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Gradient Architecture-Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range
Ji, Bing1; Zhou, Qian1; Lei, Ming1; Ding, Sen1; Song, Qi2; Gao, Yibo2; Li, Shunbo3; Xu, Yi3; Zhou, Yinning1; Zhou, Bingpu1
2021-09
Source PublicationSmall
ISSN1613-6810
Volume17Issue:43
Abstract

The sensitivity and linearity are critical parameters that can preserve the high pressure-resolution across a wide range and simplify the signal processing process of flexible tactile sensors. Although extensive micro-structured dielectrics have been explored to improve the sensitivity of capacitive sensors, the attenuation of sensitivity with increasing pressure is yet to be fully resolved. Herein, a novel dielectric layer based on the gradient micro-dome architecture (GDA) is presented to simultaneously realize the high sensitivity and ultrabroad linearity range of capacitive sensors. The gradient micro-dome pixels with rationally collocated amount and height can effectively regulate the contact area and hence enable the linear variation in effective dielectric constant of the GDA dielectric layer under varying pressures. With systematical optimization, the sensor exhibits the high sensitivity of 0.065 kPa in an ultrabroad linearity range up to 1700 kPa, which is first reported. Based on the excellent sensitivity and linearity, the high pressure-resolution can be preserved across the full scale of pressure spectrum. Therefore, potential applications such as all-round physiological signal detection in diverse scenarios, control instruction transmission with combinatorial force inputs, and convenient Morse code communication with non-overlapping capacitance signals are successfully demonstrated through a single sensor device.

KeywordCapacitive Tactile Sensors Gradient Micro-dome Architecture Linear Dielectric Behavior Ultrabroad Linear Sensing
DOI10.1002/smll.202103312
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaChemistry ; Science & Technology - Other Topics ; Materials Science ; Physics
WOS SubjectChemistry, Multidisciplinary ; Chemistry, Physical ; Nanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Physics, Applied ; Physics, Condensed Matter
WOS IDWOS:000702205300001
Scopus ID2-s2.0-85115822584
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Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
DEPARTMENT OF PHYSICS AND CHEMISTRY
Corresponding AuthorZhou, Yinning; Zhou, Bingpu
Affiliation1.Joint Key Laboratory of the Ministry of Education Institute of Applied Physics and Materials Engineering University of Macau, Avenida da Universidade, Taipa, 999078, Macao
2.Shenzhen Shineway Technology Corporation, Shenzhen, 518000, China
3.Key Laboratory of Optoelectronic Technology and Systems Ministry of Education & Key Disciplines Laboratory of Novel Micro-Nano Devices and System Technology College of Optoelectronics Engineering, Chongqing University, Chongqing, 400044, China
First Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Recommended Citation
GB/T 7714
Ji, Bing,Zhou, Qian,Lei, Ming,et al. Gradient Architecture-Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range[J]. Small, 2021, 17(43).
APA Ji, Bing., Zhou, Qian., Lei, Ming., Ding, Sen., Song, Qi., Gao, Yibo., Li, Shunbo., Xu, Yi., Zhou, Yinning., & Zhou, Bingpu (2021). Gradient Architecture-Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range. Small, 17(43).
MLA Ji, Bing,et al."Gradient Architecture-Enabled Capacitive Tactile Sensor with High Sensitivity and Ultrabroad Linearity Range".Small 17.43(2021).
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