Residential College | false |
Status | 已發表Published |
Use of Supporting Post Width to Increase the CMUT's Resonant Frequency | |
Wang, Jiujiang1,2,3,4; Pun, Sio Hang2; Yu, Yuanyu1,2,4; Liu, Yihe1; Cheng, Ching Hsiang5; Lei, Kin Fong6,7; Zhang, Shuang1,4; Mak, Peng Un8; Vai, Mang I.2,8 | |
2022-05-30 | |
Source Publication | IEEE Access |
ISSN | 2169-3536 |
Volume | 10Pages:59219-59227 |
Abstract | A new method is proposed to increase the resonant frequency of a Capacitive Micromachined Ultrasonic Transducer (CMUT) device while keeping the radii unchanged for devices fabricated by sacrificial release (SR) method. The resonant frequency of a CMUT cell is determined by the properties of the membrane such as the Young's modulus, membrane dimensions and effective membrane mass. Effective Young's modulus is used to calculate the resonant frequency of CMUT fabricated by SR method. The supporting post structure will affect the boundary conditions at the edge of the CMUT membrane and in turn affect the deflection together with the effective Young's modulus of the membrane. The perturbation method is used to derive the solution for the governing von Kármán equations. The results show that the thicker is the supporting post width, the higher is the resonant frequency. This method can also be used to simplify the mask design and CMUT fabrication process. |
Keyword | Capacitive Micromachined Ultrasonic Transducer (Cmut) Resonant Frequency Supporting Post Width |
DOI | 10.1109/ACCESS.2022.3178990 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Computer Science ; Engineering ; Telecommunications |
WOS Subject | Computer Science, Information Systems ; Engineering, Electrical & Electronic ; Telecommunications |
WOS ID | WOS:000810037800001 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
Scopus ID | 2-s2.0-85131745575 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | Faculty of Science and Technology THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU) DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
Corresponding Author | Mak, Peng Un |
Affiliation | 1.School of Artificial Intelligence, Neijiang Normal University, Neijiang, 641100, China 2.State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, 999078, Macao 3.BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing, 401332, China 4.Neijiang City Engineering Technology Research Center of Neurological Disease Information Interference, Neijiang Normal University, Neijiang, 641100, China 5.School of Automotive Engineering, Wuhan University of Technology, Wuhan, 430070, China 6.Graduate Institute of Biomedical Engineering, Chang Gung University, Taoyuan, 33302, Taiwan 7.Department of Radiation Oncology, Linkou Chang Gung Memorial Hospital, Linkou, 33305, Taiwan 8.Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau, 999078, Macao |
First Author Affilication | University of Macau |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Wang, Jiujiang,Pun, Sio Hang,Yu, Yuanyu,et al. Use of Supporting Post Width to Increase the CMUT's Resonant Frequency[J]. IEEE Access, 2022, 10, 59219-59227. |
APA | Wang, Jiujiang., Pun, Sio Hang., Yu, Yuanyu., Liu, Yihe., Cheng, Ching Hsiang., Lei, Kin Fong., Zhang, Shuang., Mak, Peng Un., & Vai, Mang I. (2022). Use of Supporting Post Width to Increase the CMUT's Resonant Frequency. IEEE Access, 10, 59219-59227. |
MLA | Wang, Jiujiang,et al."Use of Supporting Post Width to Increase the CMUT's Resonant Frequency".IEEE Access 10(2022):59219-59227. |
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