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Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency
Wang, Jiujiang1,2,3,4; Pun, Sio Hang2; Yu, Yuanyu1,2,4; Liu, Yihe1; Cheng, Ching Hsiang5; Lei, Kin Fong6,7; Zhang, Shuang1,4; Mak, Peng Un8; Vai, Mang I.2,8
2022-05-30
Source PublicationIEEE Access
ISSN2169-3536
Volume10Pages:59219 - 59227
Abstract

A new method is proposed to increase the resonant frequency of a Capacitive Micromachined Ultrasonic Transducer (CMUT) device while keeping the radii unchanged for devices fabricated by sacrificial release (SR) method. The resonant frequency of a CMUT cell is determined by the properties of the membrane such as the Young’s modulus, membrane dimensions and effective membrane mass. Effective Young’s modulus is used to calculate the resonant frequency of CMUT fabricated by SR method. The supporting post structure will affect the boundary conditions at the edge of the CMUT membrane and in turn affect the deflection together with the effective Young’s modulus of the membrane. The perturbation method is used to derive the solution for the governing von Kármán equations. The results show that the thicker is the supporting post width, the higher is the resonant frequency. This method can also be used to simplify the mask design and CMUT fabrication process.

KeywordCapacitive Micromachined Ultrasonic Transducer (Cmut) Resonant Frequency Supporting Post Width
DOI10.1109/ACCESS.2022.3178990
Indexed BySCIE
Language英語English
WOS Research AreaComputer Science ; Engineering ; Telecommunications
WOS SubjectComputer Science, Information Systems ; Engineering, Electrical & Electronic ; Telecommunications
WOS IDWOS:000810037800001
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85131745575
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
INSTITUTE OF MICROELECTRONICS
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorMak, Peng Un
Affiliation1.School of Artificial Intelligence, Neijiang Normal University, Neijiang, 641100, China
2.State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, 999078, Macao
3.BIT Chongqing Institute of Microelectronics and Microsystems, Chongqing, 401332, China
4.Neijiang City Engineering Technology Research Center of Neurological Disease Information Interference, Neijiang Normal University, Neijiang, 641100, China
5.School of Automotive Engineering, Wuhan University of Technology, Wuhan, 430070, China
6.Graduate Institute of Biomedical Engineering, Chang Gung University, Taoyuan, 33302, Taiwan
7.Department of Radiation Oncology, Linkou Chang Gung Memorial Hospital, Linkou, 33305, Taiwan
8.Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau, 999078, Macao
First Author AffilicationUniversity of Macau
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Wang, Jiujiang,Pun, Sio Hang,Yu, Yuanyu,et al. Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency[J]. IEEE Access, 2022, 10, 59219 - 59227.
APA Wang, Jiujiang., Pun, Sio Hang., Yu, Yuanyu., Liu, Yihe., Cheng, Ching Hsiang., Lei, Kin Fong., Zhang, Shuang., Mak, Peng Un., & Vai, Mang I. (2022). Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency. IEEE Access, 10, 59219 - 59227.
MLA Wang, Jiujiang,et al."Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency".IEEE Access 10(2022):59219 - 59227.
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