Residential College | false |
Status | 已發表Published |
A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor | |
Wang,Chenxi1; Wang,Chen1; Xia,Benzheng2; Zhang,Hemin1; Matavz,Aleksander2; Wang,Yuan3; Quan,Aojie1; Wang,Linlin1; Arnauts,Giel2; Tu,Min4; Ameloot,Rob2; Kraft,Michael1 | |
2023-05-09 | |
Source Publication | Journal of Microelectromechanical Systems |
ISSN | 1057-7157 |
Volume | 32Issue:4Pages:371 - 380 |
Abstract | In this work, a zeolitic imidazolate framework-8 (ZIF-8)-coated coupled resonant sensor was fabricated using a solvent-free method. The solvent-free method avoids the use of solvents for ZIF-8 synthesis, which eliminates the risk of device contamination, corrosion, or destruction. This process enables batch fabrication of ZIF-8-coated coupled resonators at wafer level. By tracking shifts in frequency and amplitude ratio, the sensor demonstrates strong responses to ethanol vapor of different concentrations and exhibits good reversible detection ability. The normalized sensitivity using amplitude ratio shift as an output metric is $6.06\times10$ $^{\mathbf{-3}}$ at low ethanol vapor concentrations (2%-7.5%), which is nearly six times that using frequency shift ( $1.06\times10$ $^{\mathbf{-3}}$ ). For higher ethanol vapor concentrations (10%-60%), the normalized sensitivity using amplitude ratio shift is $2.66\times10$ $^{\mathbf{-3}}$ , almost 40 times that using frequency shift ( $6.73\times10$ $^{\mathbf{-5}}$ ). Given the significantly enhanced sensitivity, the ZIF-8-coated coupled resonant sensor shows promising potential for ultra-sensitive gas sensing. |
Keyword | Zif-8 Coupled Resonant Sensor Reversible Detection Enhanced Sensitivity Gas Sensing |
DOI | 10.1109/JMEMS.2023.3272210 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
WOS Subject | Engineering, Electrical & Electronic ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied |
WOS ID | WOS:000988488000001 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
Scopus ID | 2-s2.0-85159847941 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU) INSTITUTE OF MICROELECTRONICS |
Corresponding Author | Wang,Chen; Zhang,Hemin |
Affiliation | 1.Department of Electrical Engineering (ESAT)-MNS, KU Leuven, Leuven, Belgium 2.Department of Chemical Engineering, KU Leuven, Leuven, Belgium 3.Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Taipa, China 4.Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai, China |
Recommended Citation GB/T 7714 | Wang,Chenxi,Wang,Chen,Xia,Benzheng,et al. A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor[J]. Journal of Microelectromechanical Systems, 2023, 32(4), 371 - 380. |
APA | Wang,Chenxi., Wang,Chen., Xia,Benzheng., Zhang,Hemin., Matavz,Aleksander., Wang,Yuan., Quan,Aojie., Wang,Linlin., Arnauts,Giel., Tu,Min., Ameloot,Rob., & Kraft,Michael (2023). A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor. Journal of Microelectromechanical Systems, 32(4), 371 - 380. |
MLA | Wang,Chenxi,et al."A Zeolitic Imidazolate Framework-8-Coated Coupled Resonant Gas Sensor".Journal of Microelectromechanical Systems 32.4(2023):371 - 380. |
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