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A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range
Qu, Ziqiang1,2; Ouyang, Hao1; Xiong, Wen1; Xu, Qiangwei1; Wang, Yuan3; Liu, Huafeng1
2023-07
Source PublicationIEEE TIE
ISSN0278-0046
Volume71Issue:6Pages:6418-6426
Abstract

 

This article presents a nano-g microopto-electromechanical system (MOEMS) accelerometer that uses the principle of Fabry-Perot (F-P) interference in conjunction with a micromechanical structure for transducing input acceleration. The device comprises a movable silicon proof mass suspended by silicon flexural beams and an F-P cavity integrated with a cleaved optical fiber. Furthermore, a closed-loop force balance mechanism is exploited to enhance the accelerometer's measurement range by utilizing magnetic force provided by a pair of permanent magnets. Comprehensive characterizations are conducted to evaluate the performance of the proposed device. The scale factor of the MOEMS accelerometer in a closed-loop configuration is determined as 9.2 V/g with a working range of +/- 1 g. Benefiting from the electromagnetic force balance, the dynamic range (DR) of the device is up to 157 dB@30 Hz, with the lowest noise floor of 10 ng/root Hz and a working bandwidth of 500 Hz. The results validate the functionality of the MOEMS accelerometer, particularly highlighting its favorable DR and working bandwidth, thus enabling a broad range of applications, such as seismic, gravity exploration, and navigation.

KeywordElectromagnetic Closed-loop Fabry-perot (F-p) Interference Laser Demodulation Micro-opto-electromechanical System (Moems)
DOI10.1109/TIE.2023.3294597
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaAutomation & Control Systems ; Engineering ; Instruments & Instrumentation
WOS SubjectAutomation & Control Systems ; Engineering, Electrical & Electronic ; Instruments & Instrumentation
WOS IDWOS:001090871600006
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85165905285
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Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
INSTITUTE OF MICROELECTRONICS
Corresponding AuthorWang, Yuan; Liu, Huafeng
Affiliation1.Huazhong University of Science and Technology, PGMF, School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, Wuhan, 430074, China
2.Optics Valley Laboratory, Hubei, 430074, China
3.University of Macau, Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, Taipa, 999078, Macao
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Qu, Ziqiang,Ouyang, Hao,Xiong, Wen,et al. A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range[J]. IEEE TIE, 2023, 71(6), 6418-6426.
APA Qu, Ziqiang., Ouyang, Hao., Xiong, Wen., Xu, Qiangwei., Wang, Yuan., & Liu, Huafeng (2023). A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range. IEEE TIE, 71(6), 6418-6426.
MLA Qu, Ziqiang,et al."A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range".IEEE TIE 71.6(2023):6418-6426.
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