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Status | 已發表Published |
A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range | |
Qu, Ziqiang1,2; Ouyang, Hao1; Xiong, Wen1; Xu, Qiangwei1; Wang, Yuan3; Liu, Huafeng1 | |
2023-07 | |
Source Publication | IEEE TIE |
ISSN | 0278-0046 |
Volume | 71Issue:6Pages:6418-6426 |
Abstract |
This article presents a nano-g microopto-electromechanical system (MOEMS) accelerometer that uses the principle of Fabry-Perot (F-P) interference in conjunction with a micromechanical structure for transducing input acceleration. The device comprises a movable silicon proof mass suspended by silicon flexural beams and an F-P cavity integrated with a cleaved optical fiber. Furthermore, a closed-loop force balance mechanism is exploited to enhance the accelerometer's measurement range by utilizing magnetic force provided by a pair of permanent magnets. Comprehensive characterizations are conducted to evaluate the performance of the proposed device. The scale factor of the MOEMS accelerometer in a closed-loop configuration is determined as 9.2 V/g with a working range of +/- 1 g. Benefiting from the electromagnetic force balance, the dynamic range (DR) of the device is up to 157 dB@30 Hz, with the lowest noise floor of 10 ng/root Hz and a working bandwidth of 500 Hz. The results validate the functionality of the MOEMS accelerometer, particularly highlighting its favorable DR and working bandwidth, thus enabling a broad range of applications, such as seismic, gravity exploration, and navigation. |
Keyword | Electromagnetic Closed-loop Fabry-perot (F-p) Interference Laser Demodulation Micro-opto-electromechanical System (Moems) |
DOI | 10.1109/TIE.2023.3294597 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Automation & Control Systems ; Engineering ; Instruments & Instrumentation |
WOS Subject | Automation & Control Systems ; Engineering, Electrical & Electronic ; Instruments & Instrumentation |
WOS ID | WOS:001090871600006 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
Scopus ID | 2-s2.0-85165905285 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | Faculty of Science and Technology THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU) INSTITUTE OF MICROELECTRONICS |
Corresponding Author | Wang, Yuan; Liu, Huafeng |
Affiliation | 1.Huazhong University of Science and Technology, PGMF, School of Physics, MOE Key Laboratory of Fundamental Physical Quantities Measurement, Hubei Key Laboratory of Gravitation and Quantum Physics, Wuhan, 430074, China 2.Optics Valley Laboratory, Hubei, 430074, China 3.University of Macau, Institute of Microelectronics, State Key Laboratory of Analog and Mixed-Signal VLSI, Taipa, 999078, Macao |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Qu, Ziqiang,Ouyang, Hao,Xiong, Wen,et al. A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range[J]. IEEE TIE, 2023, 71(6), 6418-6426. |
APA | Qu, Ziqiang., Ouyang, Hao., Xiong, Wen., Xu, Qiangwei., Wang, Yuan., & Liu, Huafeng (2023). A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range. IEEE TIE, 71(6), 6418-6426. |
MLA | Qu, Ziqiang,et al."A Nano-g MOEMS Accelerometer Featuring Electromagnetic Force Balance With 157-dB Dynamic Range".IEEE TIE 71.6(2023):6418-6426. |
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