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Double spiral resonant MEMS scanning for ultra-high-speed miniaturized optical microscopy
Li, Linyang1; Liang, Xiao1,2; Qin, Wei1; Guo, Heng1; Qi, Weizhi1; Jin, Tian1; Tang, Jianbo1; Xi, Lei1,3,4
2023-09
Source PublicationOptica
ISSN2334-2536
Volume10Issue:9Pages:1195-1202
Abstract

Micro–electro–mechanical systems (MEMS)-based optical scanners play a vital role in the development of miniaturized optical imaging modalities. However, there is a longstanding challenge to balance the temporal resolution, field of view (FOV), and systematic fidelity. Here, we propose a double spiral scanning mechanism to enable high-frequency resonant scanning of MEMS scanners without sacrificing imaging quality, and offer a versatile imaging interface for applications in different scenarios. This arrangement, demonstrated by photoacoustic endoscopy, shows that the imaging rate and FOV can be improved by more than 60 and two times, respectively. The proposed method is general to address the limitations of MEMS-based scanning microscopies and can be adapted for various miniaturized imaging modalities, such as endoscopy, intraoperative image-guided surgery, and wearable devices.

DOI10.1364/OPTICA.498628
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaOptics
WOS SubjectOptics
WOS IDWOS:001083649300002
PublisherOptica Publishing Group, 2010 MASSACHUSETTS AVE NW, WASHINGTON, DC 20036
Scopus ID2-s2.0-85175057446
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionFaculty of Health Sciences
Corresponding AuthorTang, Jianbo; Xi, Lei
Affiliation1.Department of Biomedical Engineering, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, China
2.Faculty of Health Sciences, University of Macau, 999078, Macao
3.Guangdong Provincial Key Laboratory of Advanced Biomaterials, Southern University of Science and Technology, Shenzhen, Guangdong, 518055, China
4.Shenzhen Bay Laboratory, Shenzhen, Guangdong, 518132, China
Recommended Citation
GB/T 7714
Li, Linyang,Liang, Xiao,Qin, Wei,et al. Double spiral resonant MEMS scanning for ultra-high-speed miniaturized optical microscopy[J]. Optica, 2023, 10(9), 1195-1202.
APA Li, Linyang., Liang, Xiao., Qin, Wei., Guo, Heng., Qi, Weizhi., Jin, Tian., Tang, Jianbo., & Xi, Lei (2023). Double spiral resonant MEMS scanning for ultra-high-speed miniaturized optical microscopy. Optica, 10(9), 1195-1202.
MLA Li, Linyang,et al."Double spiral resonant MEMS scanning for ultra-high-speed miniaturized optical microscopy".Optica 10.9(2023):1195-1202.
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