Residential College | false |
Status | 已發表Published |
Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure | |
Yu, Yuanyu1; Pun, Sio Hang1; Mak, Peng Un1; Cheng, Ching-Hsiang1,2; Wang, Jiujiang1; Mak, Pui-In1; Vai, Mang I.1 | |
2016-06 | |
Source Publication | IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control |
ISSN | 0885-3010 |
Volume | 63Issue:6Pages:854-863 |
Abstract | Capacitive micromachined ultrasonic transducers (CMUTs) have emerged as a competitive alternative to piezoelectric ultrasonic transducers, especially in medical ultrasound imaging and therapeutic ultrasound applications, which require high output pressure. However, as compared with piezoelectric ultrasonic transducers, the output pressure capability of CMUTs remains to be improved. In this paper, a novel structure is proposed by forming an embossed vibrating membrane on a CMUT cell operating in the collapse mode to increase the maximum output pressure. By using a beam model in undamped conditions and finite-element analysis simulations, the proposed embossed structure showed improvement on the maximum output pressure of the CMUT cell when the embossed pattern was placed on the estimated location of the peak deflection. As compared with a uniform membrane CMUT cell worked in the collapse mode, the proposed CMUT cell can yield the maximum output pressure by 51.1% and 88.1% enhancement with a single embossed pattern made of SiN and nickel, respectively. The maximum output pressures were improved by 34.9% (a single SiN embossed pattern) and 46.7% (a single nickel embossed pattern) with the uniform membrane when the center frequencies of both original and embossed CMUT designs were similar. |
Keyword | Capacitive Micromachined Ultrasonic Transducer (Cmut) Embossed Membrane Output Pressure |
DOI | 10.1109/TUFFC.2016.2554612 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Acoustics ; Engineering |
WOS Subject | Acoustics ; Engineering, Electrical & Electronic |
WOS ID | WOS:000377498200005 |
Scopus ID | 2-s2.0-84973365175 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | INSTITUTE OF MICROELECTRONICS Faculty of Science and Technology DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
Corresponding Author | Yu, Yuanyu |
Affiliation | 1.University of Macau 2.Hong Kong Polytechnic University |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Yu, Yuanyu,Pun, Sio Hang,Mak, Peng Un,et al. Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2016, 63(6), 854-863. |
APA | Yu, Yuanyu., Pun, Sio Hang., Mak, Peng Un., Cheng, Ching-Hsiang., Wang, Jiujiang., Mak, Pui-In., & Vai, Mang I. (2016). Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 63(6), 854-863. |
MLA | Yu, Yuanyu,et al."Design of a Collapse-Mode CMUT with an Embossed Membrane for Improving Output Pressure".IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control 63.6(2016):854-863. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment