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A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators
Wang, Chen1; Quan, Aojie1; Wang, Linlin1; Esteves, Rui Amendoeira1; Wang, Yuan3; Madeira, Bernardo P.1; Guan, Yangyang1; Wu, Xinyu1; Kuznetsova, Nadezda1; Shojaeian, Milad1; Zhang, Pan2,3; Mak, Pui In3; Kraft, Michael1
2024
Conference Name37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Source PublicationProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Pages903-906
Conference DateJAN 21-25, 2024
Conference PlaceAustin, TX
Abstract

This paper presents an innovative resonant microelectromechanical system (MEMS) accelerometer that operates effectively under atmospheric pressure. It utilizes thermally actuated piezoresistive resonators as the core transduction element for both excitation and sensing. To enhance sensitivity, an optimized lever system is integrated to amplify the inertial force resulting from acceleration input on the resonators. The resonators consist of two piezoresistive nano-beams that are thermally actuated in air, exhibiting a quality factor of 1723 and a resonant frequency of approximately 1.712 MHz. Moreover, the utilization of two resonators enables a differential sensing scheme for acceleration input, effectively mitigating the influence of ambient temperature fluctuations. Experimental findings demonstrate that the proposed resonant MEMS accelerometer achieves a sensitivity of 572 Hz/g. This novel sensing principle holds promise for diverse applications in the realm of resonant MEMS sensors, encompassing MEMS accelerometers and gyroscopes.

KeywordMicroelectromechanical System (Mems) Accelerometer Piezoresistive Resonators Quality (q) Factor Thermal Actuation
DOI10.1109/MEMS58180.2024.10439523
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic ; Engineering, Mechanical
WOS IDWOS:001174201100232
Scopus ID2-s2.0-85186664105
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionINSTITUTE OF MICROELECTRONICS
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorWang, Yuan
Affiliation1.Mns, University of Leuven, Esat Department, Belgium
2.Peking University, National Key Laboratory of Advanced Micro and Nano Manufacture Technology, School of Integrated Circuits, China
3.University of Macau, Institute of Microelectronics, Macao
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Wang, Chen,Quan, Aojie,Wang, Linlin,et al. A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators[C], 2024, 903-906.
APA Wang, Chen., Quan, Aojie., Wang, Linlin., Esteves, Rui Amendoeira., Wang, Yuan., Madeira, Bernardo P.., Guan, Yangyang., Wu, Xinyu., Kuznetsova, Nadezda., Shojaeian, Milad., Zhang, Pan., Mak, Pui In., & Kraft, Michael (2024). A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 903-906.
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