Residential College | false |
Status | 已發表Published |
A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators | |
Wang, Chen1; Quan, Aojie1; Wang, Linlin1; Esteves, Rui Amendoeira1; Wang, Yuan3; Madeira, Bernardo P.1; Guan, Yangyang1; Wu, Xinyu1; Kuznetsova, Nadezda1; Shojaeian, Milad1; Zhang, Pan2,3; Mak, Pui In3; Kraft, Michael1 | |
2024 | |
Conference Name | 37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Source Publication | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
Pages | 903-906 |
Conference Date | JAN 21-25, 2024 |
Conference Place | Austin, TX |
Abstract | This paper presents an innovative resonant microelectromechanical system (MEMS) accelerometer that operates effectively under atmospheric pressure. It utilizes thermally actuated piezoresistive resonators as the core transduction element for both excitation and sensing. To enhance sensitivity, an optimized lever system is integrated to amplify the inertial force resulting from acceleration input on the resonators. The resonators consist of two piezoresistive nano-beams that are thermally actuated in air, exhibiting a quality factor of 1723 and a resonant frequency of approximately 1.712 MHz. Moreover, the utilization of two resonators enables a differential sensing scheme for acceleration input, effectively mitigating the influence of ambient temperature fluctuations. Experimental findings demonstrate that the proposed resonant MEMS accelerometer achieves a sensitivity of 572 Hz/g. This novel sensing principle holds promise for diverse applications in the realm of resonant MEMS sensors, encompassing MEMS accelerometers and gyroscopes. |
Keyword | Microelectromechanical System (Mems) Accelerometer Piezoresistive Resonators Quality (q) Factor Thermal Actuation |
DOI | 10.1109/MEMS58180.2024.10439523 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Engineering |
WOS Subject | Engineering, Electrical & Electronic ; Engineering, Mechanical |
WOS ID | WOS:001174201100232 |
Scopus ID | 2-s2.0-85186664105 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | INSTITUTE OF MICROELECTRONICS DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
Corresponding Author | Wang, Yuan |
Affiliation | 1.Mns, University of Leuven, Esat Department, Belgium 2.Peking University, National Key Laboratory of Advanced Micro and Nano Manufacture Technology, School of Integrated Circuits, China 3.University of Macau, Institute of Microelectronics, Macao |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Wang, Chen,Quan, Aojie,Wang, Linlin,et al. A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators[C], 2024, 903-906. |
APA | Wang, Chen., Quan, Aojie., Wang, Linlin., Esteves, Rui Amendoeira., Wang, Yuan., Madeira, Bernardo P.., Guan, Yangyang., Wu, Xinyu., Kuznetsova, Nadezda., Shojaeian, Milad., Zhang, Pan., Mak, Pui In., & Kraft, Michael (2024). A Novel Resonant MEMS Accelerometer Operating in Air with Thermally Actuated Piezoresistive Resonators. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 903-906. |
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