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A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution
Wang, Linlin1; Wang, Chen1; Quan, Aojie1; Wang, Yuan2; Wang, Chenxi1; Madeira, Bernardo P.1; Li, Chengxin1; Kraft, Michael1
2023
Conference Name22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Source Publication2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023
Pages533-536
Conference Date25 June 2023through 29 June 2023
Conference PlaceKyoto
Abstract

This paper presents a mass sensor based on a 3-degree-of-freedom (DoF) mode localized piezoelectric bulk acoustic wave (BAW) resonator system operating in the contour extensional mode for the first time. It features a quality factor of ~4200 under atmospheric pressure at a resonance frequency of ~6.36 MHz. The mass resolution based on the amplitude ratio output readout is 1.2 pg. Compared with the state of the art, the present device achieved an enhanced performance in terms of both quality factor (~2.37 times higher) and mass resolution (~307 times higher).

Keyword3-dof Coupled Baw Resonators Mass Sensor Mode Localization Quality Factor
URLView the original
Language英語English
Scopus ID2-s2.0-85193506536
Fulltext Access
Citation statistics
Document TypeConference paper
CollectionINSTITUTE OF MICROELECTRONICS
Affiliation1.Ku Leuven, Belgium
2.University Of Macau, Macao
Recommended Citation
GB/T 7714
Wang, Linlin,Wang, Chen,Quan, Aojie,et al. A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution[C], 2023, 533-536.
APA Wang, Linlin., Wang, Chen., Quan, Aojie., Wang, Yuan., Wang, Chenxi., Madeira, Bernardo P.., Li, Chengxin., & Kraft, Michael (2023). A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 533-536.
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