Residential College | false |
Status | 已發表Published |
A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution | |
Wang, Linlin1; Wang, Chen1; Quan, Aojie1; Wang, Yuan2; Wang, Chenxi1; Madeira, Bernardo P.1; Li, Chengxin1; Kraft, Michael1 | |
2023 | |
Conference Name | 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
Source Publication | 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023 |
Pages | 533-536 |
Conference Date | 25 June 2023through 29 June 2023 |
Conference Place | Kyoto |
Abstract | This paper presents a mass sensor based on a 3-degree-of-freedom (DoF) mode localized piezoelectric bulk acoustic wave (BAW) resonator system operating in the contour extensional mode for the first time. It features a quality factor of ~4200 under atmospheric pressure at a resonance frequency of ~6.36 MHz. The mass resolution based on the amplitude ratio output readout is 1.2 pg. Compared with the state of the art, the present device achieved an enhanced performance in terms of both quality factor (~2.37 times higher) and mass resolution (~307 times higher). |
Keyword | 3-dof Coupled Baw Resonators Mass Sensor Mode Localization Quality Factor |
URL | View the original |
Language | 英語English |
Scopus ID | 2-s2.0-85193506536 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | INSTITUTE OF MICROELECTRONICS |
Affiliation | 1.Ku Leuven, Belgium 2.University Of Macau, Macao |
Recommended Citation GB/T 7714 | Wang, Linlin,Wang, Chen,Quan, Aojie,et al. A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution[C], 2023, 533-536. |
APA | Wang, Linlin., Wang, Chen., Quan, Aojie., Wang, Yuan., Wang, Chenxi., Madeira, Bernardo P.., Li, Chengxin., & Kraft, Michael (2023). A Mass Sensor Based on 3-DoF Mode Localized BAW Resonators with Enhanced Quality Factor and Resolution. 2023 22nd International Conference on Solid-State Sensors, Actuators and Microsystems, Transducers 2023, 533-536. |
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