Residential College | false |
Status | 已發表Published |
Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process | |
Cao, Boyang; Lei, Ka Meng; Zou, Hengchen; Martins, Rui P.; Mak, Pui In | |
2024-09 | |
Source Publication | IEEE Sensors Journal |
ISSN | 1530-437X |
Volume | 24Issue:17Pages:27365-27372 |
Abstract | This paper proposed a Hall cross plate for magnetic field detection with substrate biasing to improve the sensitivity. By adjusting the bias voltage of the reversed-biased pn-junction (VPN) formed by the N-well and the P-well underneath, we can modulate the thickness of the depletion layer and, thus, the effective thickness of the cross plate formed by the N-well, eventually ameliorating the sensitivity. We verified the proposed substrate-biased Hall sensor with finite-element analysis and measurement from the cross plate prototyped in the 180-nm silicon-on-insulator CMOS process. From the measurement, the resistance of the cross-plate changes from 2.13 to 2.39 kΩ when the VPN decreases from 0 to −0.6 V, indicating the variation in the sheet resistance, induced by the change in the thickness of the cross-plate. Moreover, the current-related sensitivity increased by 28.4% in the current mode when VPN changed from 0 V to −0.6 V. The Hall plate achieves a current-related sensitivity of 0.3 V/mA·T with a power consumption of 6.5 mW. |
Keyword | Cmos Cross Plate Horizontal Hall Sensor Substrate-biased |
DOI | 10.1109/JSEN.2024.3431935 |
URL | View the original |
Language | 英語English |
Publisher | Institute of Electrical and Electronics Engineers Inc. |
Scopus ID | 2-s2.0-85199575350 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | Faculty of Science and Technology THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU) INSTITUTE OF MICROELECTRONICS DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
Corresponding Author | Lei, Ka Meng |
Affiliation | State Key Laboratory of Analog and Mixed-Signal VLSI/Institute of Microelectronics and the Department of Electrical and Computer Engineering (ECE)/Faculty of Science and Technology, University of Macau, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Cao, Boyang,Lei, Ka Meng,Zou, Hengchen,et al. Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process[J]. IEEE Sensors Journal, 2024, 24(17), 27365-27372. |
APA | Cao, Boyang., Lei, Ka Meng., Zou, Hengchen., Martins, Rui P.., & Mak, Pui In (2024). Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process. IEEE Sensors Journal, 24(17), 27365-27372. |
MLA | Cao, Boyang,et al."Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process".IEEE Sensors Journal 24.17(2024):27365-27372. |
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