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Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process
Cao, Boyang; Lei, Ka Meng; Zou, Hengchen; Martins, Rui P.; Mak, Pui In
2024-09
Source PublicationIEEE Sensors Journal
ISSN1530-437X
Volume24Issue:17Pages:27365-27372
Abstract

This paper proposed a Hall cross plate for magnetic field detection with substrate biasing to improve the sensitivity. By adjusting the bias voltage of the reversed-biased pn-junction (VPN) formed by the N-well and the P-well underneath, we can modulate the thickness of the depletion layer and, thus, the effective thickness of the cross plate formed by the N-well, eventually ameliorating the sensitivity. We verified the proposed substrate-biased Hall sensor with finite-element analysis and measurement from the cross plate prototyped in the 180-nm silicon-on-insulator CMOS process. From the measurement, the resistance of the cross-plate changes from 2.13 to 2.39 kΩ when the VPN decreases from 0 to −0.6 V, indicating the variation in the sheet resistance, induced by the change in the thickness of the cross-plate. Moreover, the current-related sensitivity increased by 28.4% in the current mode when VPN changed from 0 V to −0.6 V. The Hall plate achieves a current-related sensitivity of 0.3 V/mA·T with a power consumption of 6.5 mW.

KeywordCmos Cross Plate Horizontal Hall Sensor Substrate-biased
DOI10.1109/JSEN.2024.3431935
URLView the original
Language英語English
PublisherInstitute of Electrical and Electronics Engineers Inc.
Scopus ID2-s2.0-85199575350
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Document TypeJournal article
CollectionFaculty of Science and Technology
THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
INSTITUTE OF MICROELECTRONICS
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorLei, Ka Meng
AffiliationState Key Laboratory of Analog and Mixed-Signal VLSI/Institute of Microelectronics and the Department of Electrical and Computer Engineering (ECE)/Faculty of Science and Technology, University of Macau, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Cao, Boyang,Lei, Ka Meng,Zou, Hengchen,et al. Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process[J]. IEEE Sensors Journal, 2024, 24(17), 27365-27372.
APA Cao, Boyang., Lei, Ka Meng., Zou, Hengchen., Martins, Rui P.., & Mak, Pui In (2024). Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process. IEEE Sensors Journal, 24(17), 27365-27372.
MLA Cao, Boyang,et al."Exploring the Performance of Hall Sensor with Substrate Bias Modulation in SOI Process".IEEE Sensors Journal 24.17(2024):27365-27372.
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