Residential College | false |
Status | 已發表Published |
On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation | |
Li, Chengxin1; Quan, Aojie1; Zhang, Hemin2; Wang, Chen1; Wang, Linlin1; Mert Torunbalci, Mustafa3,4; Wang, Yuan5; Kraft, Michael1 | |
2024 | |
Source Publication | Journal of Microelectromechanical Systems |
ISSN | 1057-7157 |
Volume | 33Issue:5Pages:568-576 |
Abstract | In this work, the relationship between nonlinear effects and the signal-to-noise ratio of a resonator is analyzed and the impact of reducing nonlinear effects of the resonator on the performance of a resonant accelerometer is investigated. A theoretical framework is formulated to evaluate the dynamic range of the double clamped-clamped resonator. A reduction of the mechanical nonlinearity is achieved through an external electrostatic force, resulting in an enhancement of the dynamic range from 93.8 dB to 132.6 dB. Experimental findings indicate the nonlinear coefficient is reduced to 2.2% compared to an approach without nonlinearity compensation. The nonlinearity compensation demonstrates a 12.8 dB improvement in the signal-to-noise ratio of the resonator, leading to a 5.5-fold increase in resolution of the accelerometer and an extension of the dynamic range by 15 dB. The proposed technique enables the performance of resonant sensors to be further optimized. [2024-0107] |
Keyword | Dynamic Range Nonlinear Effects Nonlinearity Compensation Resonant Accelerometer Signal-to-noise Ratio |
DOI | 10.1109/JMEMS.2024.3443641 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics |
WOS Subject | Engineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied |
WOS ID | WOS:001303340100001 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
Scopus ID | 2-s2.0-85206850798 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | INSTITUTE OF MICROELECTRONICS |
Corresponding Author | Zhang, Hemin; Wang, Chen |
Affiliation | 1.ESAT Research Division Micro- and Nano-Systems (ESAT-MNS), Department of Electrical Engineering, Leuven, 3001, Belgium 2.Northwestern Polytechnical University, MOE Key Laboratory of Micro and Nano Systems for Aerospace, Xi'an, 710072, China 3.Broadcom, San Jose, 95134, United States 4.Google, Goleta, 93131, United States 5.Institute of Microelectronics, University of Macau, Macau, Macao |
Recommended Citation GB/T 7714 | Li, Chengxin,Quan, Aojie,Zhang, Hemin,et al. On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation[J]. Journal of Microelectromechanical Systems, 2024, 33(5), 568-576. |
APA | Li, Chengxin., Quan, Aojie., Zhang, Hemin., Wang, Chen., Wang, Linlin., Mert Torunbalci, Mustafa., Wang, Yuan., & Kraft, Michael (2024). On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation. Journal of Microelectromechanical Systems, 33(5), 568-576. |
MLA | Li, Chengxin,et al."On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation".Journal of Microelectromechanical Systems 33.5(2024):568-576. |
Files in This Item: | There are no files associated with this item. |
Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.
Edit Comment