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On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation
Li, Chengxin1; Quan, Aojie1; Zhang, Hemin2; Wang, Chen1; Wang, Linlin1; Mert Torunbalci, Mustafa3,4; Wang, Yuan5; Kraft, Michael1
2024
Source PublicationJournal of Microelectromechanical Systems
ISSN1057-7157
Volume33Issue:5Pages:568-576
Abstract

In this work, the relationship between nonlinear effects and the signal-to-noise ratio of a resonator is analyzed and the impact of reducing nonlinear effects of the resonator on the performance of a resonant accelerometer is investigated. A theoretical framework is formulated to evaluate the dynamic range of the double clamped-clamped resonator. A reduction of the mechanical nonlinearity is achieved through an external electrostatic force, resulting in an enhancement of the dynamic range from 93.8 dB to 132.6 dB. Experimental findings indicate the nonlinear coefficient is reduced to 2.2% compared to an approach without nonlinearity compensation. The nonlinearity compensation demonstrates a 12.8 dB improvement in the signal-to-noise ratio of the resonator, leading to a 5.5-fold increase in resolution of the accelerometer and an extension of the dynamic range by 15 dB. The proposed technique enables the performance of resonant sensors to be further optimized. [2024-0107]

KeywordDynamic Range Nonlinear Effects Nonlinearity Compensation Resonant Accelerometer Signal-to-noise Ratio
DOI10.1109/JMEMS.2024.3443641
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS SubjectEngineering, Electrical & Electronic Nanoscience & Nanotechnology Instruments & Instrumentation Physics, Applied
WOS IDWOS:001303340100001
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85206850798
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Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF MICROELECTRONICS
Corresponding AuthorZhang, Hemin; Wang, Chen
Affiliation1.ESAT Research Division Micro- and Nano-Systems (ESAT-MNS), Department of Electrical Engineering, Leuven, 3001, Belgium
2.Northwestern Polytechnical University, MOE Key Laboratory of Micro and Nano Systems for Aerospace, Xi'an, 710072, China
3.Broadcom, San Jose, 95134, United States
4.Google, Goleta, 93131, United States
5.Institute of Microelectronics, University of Macau, Macau, Macao
Recommended Citation
GB/T 7714
Li, Chengxin,Quan, Aojie,Zhang, Hemin,et al. On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation[J]. Journal of Microelectromechanical Systems, 2024, 33(5), 568-576.
APA Li, Chengxin., Quan, Aojie., Zhang, Hemin., Wang, Chen., Wang, Linlin., Mert Torunbalci, Mustafa., Wang, Yuan., & Kraft, Michael (2024). On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation. Journal of Microelectromechanical Systems, 33(5), 568-576.
MLA Li, Chengxin,et al."On Extending Signal-to-Noise Ratio of Resonators for a MEMS Resonant Accelerometers Using Nonlinearity Compensation".Journal of Microelectromechanical Systems 33.5(2024):568-576.
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