UM  > INSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Residential Collegefalse
Status即將出版Forthcoming
Domain-limiting effect modulation of laser debonding threshold based on wafer stacking structure for advanced packaging
Dai, Wenxue1,2; Zhang, Jieyuan1; Wang, Fangcheng1; Liu, Qiang1; Huang, Mingqi3; Wang, Tao1; Zhang, Guoping1; Zhou, Bingpu2; Sun, Rong1
2025-04-01
Source PublicationApplied Surface Science
ISSN0169-4332
Volume687
Abstract

Laser debonding technology has been widely used in advanced packaging of high-performance chips, such as chiplet, high bandwidth memofy, fan-out, and 2.5/3-dimensional and other packages. However, there are few reports on how the domain-limiting effect in wafer stacking structures affects the laser stripping difficulty and ablation threshold of organic bonding materials. Here, we propose a new method to reduce the laser debonding threshold of temporary bonding materials (TBM) based on the enhancement of the domain-limiting effect. Compared with the surface ablate approach, the domain-limited confinement effect is able to gather the laser-induced plasma in the confined-domain space to produce higher transient temperatures as well as durations, which reduces the ablation threshold of the TBM. The increase in modulus of the TBM layer enables the enhancement of the domain-limiting effect, which facilitates the extension of laser-induced shocks in the horizontal plane. The optimized high-modulus monolayer TBM can be debonded without damage during laser beam scanning at low energy density (150 mJ/cm). It provides sufficient theoretical support for the development of next-generation, large-sized, ultrathin wafer-level debonding in the field of advanced packages.

KeywordLaser Debonding Technology Monolayer Materials Domain-limiting Effect Ablation Threshold Advanced Packaging
DOI10.1016/j.apsusc.2024.162219
URLView the original
Language英語English
Scopus ID2-s2.0-85214013964
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding AuthorWang, Fangcheng; Zhang, Guoping
Affiliation1.Shenzhen Institute of Advanced Electronic Materials, Shenzhen Institutes of Advanced Technology, Chinese Academy of Sciences, Shenzhen, 518055, China
2.Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Avenida da Universidade, Taipa, 999078, Macao
3.Shenzhen Samcien Semiconductor Materials Co., Ltd, Shenzhen, 518103, China
First Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Recommended Citation
GB/T 7714
Dai, Wenxue,Zhang, Jieyuan,Wang, Fangcheng,et al. Domain-limiting effect modulation of laser debonding threshold based on wafer stacking structure for advanced packaging[J]. Applied Surface Science, 2025, 687.
APA Dai, Wenxue., Zhang, Jieyuan., Wang, Fangcheng., Liu, Qiang., Huang, Mingqi., Wang, Tao., Zhang, Guoping., Zhou, Bingpu., & Sun, Rong (2025). Domain-limiting effect modulation of laser debonding threshold based on wafer stacking structure for advanced packaging. Applied Surface Science, 687.
MLA Dai, Wenxue,et al."Domain-limiting effect modulation of laser debonding threshold based on wafer stacking structure for advanced packaging".Applied Surface Science 687(2025).
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Dai, Wenxue]'s Articles
[Zhang, Jieyuan]'s Articles
[Wang, Fangcheng]'s Articles
Baidu academic
Similar articles in Baidu academic
[Dai, Wenxue]'s Articles
[Zhang, Jieyuan]'s Articles
[Wang, Fangcheng]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Dai, Wenxue]'s Articles
[Zhang, Jieyuan]'s Articles
[Wang, Fangcheng]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.