Residential College | false |
Status | 已發表Published |
Study of the Electron Gas Behavior in an ECR Multipolar Plasma Source | |
P. Mak; W. Tan; F.C. Sze; T.A. Grotjohn; J. Asmussen | |
1992-06 | |
Conference Name | 1992 IEEE International Conference on Plasma |
Source Publication | IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma |
Conference Date | 1-3 June 1992 |
Conference Place | Tampa, FL, USA, USA |
DOI | 10.1109/PLASMA.1992.697832 |
Indexed By | CPCI-S |
Language | 英語English |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | Faculty of Science and Technology DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING |
Affiliation | Michigan State University |
Recommended Citation GB/T 7714 | P. Mak,W. Tan,F.C. Sze,et al. Study of the Electron Gas Behavior in an ECR Multipolar Plasma Source[C], 1992. |
APA | P. Mak., W. Tan., F.C. Sze., T.A. Grotjohn., & J. Asmussen (1992). Study of the Electron Gas Behavior in an ECR Multipolar Plasma Source. IEEE Conference Record - Abstracts. 1992 IEEE International Conference on Plasma. |
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