UM
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Orderly array of in-plane gaas nanowires on exact (001) silicon for antiphase-domain-free GaAs thin films
Li Q.; Ng K.W.; Lau K.M.
2015
Source PublicationCS MANTECH 2015 - 2015 International Conference on Compound Semiconductor Manufacturing Technology
Pages71-74
AbstractWe report material characterization of antiphase-domain-free GaAs thin films grown out of highly ordered in-plane GaAs nanowires on exact (001) silicon substrates. The evolution of surface morphology from the nanowires to the thin films has been investigated by SEM. Anisotropic defect distribution and the impact of the initial nanowire quality on the resultant coalesced layers have been analyzed by TEM, XRD and AFM. The growth scheme in this work opens up a promising path to integrate GaAs based devices on the CMOS-compatible Si platform.
KeywordAspect ratio trapping III-V on silicon Planar nanowires Thin films
URLView the original
Language英語English
Fulltext Access
Document TypeConference paper
CollectionUniversity of Macau
AffiliationHong Kong University of Science and Technology
Recommended Citation
GB/T 7714
Li Q.,Ng K.W.,Lau K.M.. Orderly array of in-plane gaas nanowires on exact (001) silicon for antiphase-domain-free GaAs thin films[C], 2015, 71-74.
APA Li Q.., Ng K.W.., & Lau K.M. (2015). Orderly array of in-plane gaas nanowires on exact (001) silicon for antiphase-domain-free GaAs thin films. CS MANTECH 2015 - 2015 International Conference on Compound Semiconductor Manufacturing Technology, 71-74.
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