Residential College | false |
Status | 已發表Published |
Optimization of group v switching times for InGaP/GaAs heterostructures grown by LP-MOCVD | |
Yang Q.; Hartmann Q.J.; Curtis A.P.; Lin C.; Ahmari D.A.; Scott D.; Kuo H.C.; Chen H.; Stillman G.E. | |
1997 | |
Conference Name | 24th IEEE International Symposium on Compound Semiconductors |
Source Publication | Proceedings of the IEEE 24th International Symposium on Compound Semiconductors, ISCS 1997 |
Pages | 95-98 |
Conference Date | SEP 08-11, 1997 |
Conference Place | SAN DIEGO, CALIFORNIA |
Abstract | We studied the effect of group V switching times on the formation of interfacial layers in InGaP/GaAs heterostructures grown by LP-MOCVD using low temperature photoluminescence (PL), double crystal X-ray diffraction (DCXRD) and high resolution transmission electron microscopy (HRTEM). Due to the severe substitution process of P by As, the quality of InGaP-to-GaAs interface was very sensitive to switching times. By optimizing the switching conditions, we were able to minimize the interfacial layers to one monolayer (ML) of In Ga As at the GaAs-to-InGaP interface and 1 ML of In Ga P As at the InGaP-to-GaAs interface. Heterojunction bipolar transistors (HBTs) grown using this switching scheme showed excellent etch selectivity as well as dc characteristics. |
DOI | 10.1109/ISCS.1998.711571 |
URL | View the original |
Language | 英語English |
WOS ID | WOS:000074779700022 |
Scopus ID | 2-s2.0-57449084182 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | University of Macau |
Affiliation | University of Illinois at Urbana-Champaign |
Recommended Citation GB/T 7714 | Yang Q.,Hartmann Q.J.,Curtis A.P.,et al. Optimization of group v switching times for InGaP/GaAs heterostructures grown by LP-MOCVD[C], 1997, 95-98. |
APA | Yang Q.., Hartmann Q.J.., Curtis A.P.., Lin C.., Ahmari D.A.., Scott D.., Kuo H.C.., Chen H.., & Stillman G.E. (1997). Optimization of group v switching times for InGaP/GaAs heterostructures grown by LP-MOCVD. Proceedings of the IEEE 24th International Symposium on Compound Semiconductors, ISCS 1997, 95-98. |
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