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Optimization of group v switching times for InGaP/GaAs heterostructures grown by LP-MOCVD
Yang Q.; Hartmann Q.J.; Curtis A.P.; Lin C.; Ahmari D.A.; Scott D.; Kuo H.C.; Chen H.; Stillman G.E.
1997
Conference Name24th IEEE International Symposium on Compound Semiconductors
Source PublicationProceedings of the IEEE 24th International Symposium on Compound Semiconductors, ISCS 1997
Pages95-98
Conference DateSEP 08-11, 1997
Conference PlaceSAN DIEGO, CALIFORNIA
Abstract

We studied the effect of group V switching times on the formation of interfacial layers in InGaP/GaAs heterostructures grown by LP-MOCVD using low temperature photoluminescence (PL), double crystal X-ray diffraction (DCXRD) and high resolution transmission electron microscopy (HRTEM). Due to the severe substitution process of P by As, the quality of InGaP-to-GaAs interface was very sensitive to switching times. By optimizing the switching conditions, we were able to minimize the interfacial layers to one monolayer (ML) of In Ga As at the GaAs-to-InGaP interface and 1 ML of In Ga P As at the InGaP-to-GaAs interface. Heterojunction bipolar transistors (HBTs) grown using this switching scheme showed excellent etch selectivity as well as dc characteristics.

DOI10.1109/ISCS.1998.711571
URLView the original
Language英語English
WOS IDWOS:000074779700022
Scopus ID2-s2.0-57449084182
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Document TypeConference paper
CollectionUniversity of Macau
AffiliationUniversity of Illinois at Urbana-Champaign
Recommended Citation
GB/T 7714
Yang Q.,Hartmann Q.J.,Curtis A.P.,et al. Optimization of group v switching times for InGaP/GaAs heterostructures grown by LP-MOCVD[C], 1997, 95-98.
APA Yang Q.., Hartmann Q.J.., Curtis A.P.., Lin C.., Ahmari D.A.., Scott D.., Kuo H.C.., Chen H.., & Stillman G.E. (1997). Optimization of group v switching times for InGaP/GaAs heterostructures grown by LP-MOCVD. Proceedings of the IEEE 24th International Symposium on Compound Semiconductors, ISCS 1997, 95-98.
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