Implementation of complementary metal-oxide-semiconductor microelectromechanical systems Lorentz force two axis angular actuator

doi:10.1143/JJAP.51.06FL09

Residential College	false
Status	已發表Published
	Implementation of complementary metal-oxide-semiconductor microelectromechanical systems Lorentz force two axis angular actuator
	Sun C.-M.1; Wu C.-L.2; Wang C.1; Chang C.-I.1; Yip M.-C.1; Fang W.1
	2012-06-01
Source Publication	Japanese Journal of Applied Physics
ISSN	00214922 13474065
Volume	51 Issue:6 PART 2
Abstract	We present a novel dual-axis complementary metal-oxide-semiconductor (CMOS) microelectromechanical systems (MEMS) angular actuator driven by Lorentz force. The device has been successfully implemented using the Taiwan Semiconductor Manufacturing Company (TSMC) twopoly four-metal (2P4M) process. The current routing achieved with three metal layers enables independent driving for each axis. The measurement results show that the device has resonant frequencies of 1.36 and 2.26 kHz for the two axes. © 2012 The Japan Society of Applied Physics.
DOI	10.1143/JJAP.51.06FL09
URL	View the original
Language	英語English
WOS ID	WOS:000306189800131
Scopus ID	2-s2.0-84863313069
Fulltext Access	View Full-Text via DOI View Full-Text via Web of Science View Full-Text via Scopus
Citation statistics
Document Type	Journal article
Collection	University of Macau
Affiliation	1.National Tsing Hua University 2.Industrial Technology Research Institute of Taiwan
Recommended Citation GB/T 7714	Sun C.-M.,Wu C.-L.,Wang C.,et al. Implementation of complementary metal-oxide-semiconductor microelectromechanical systems Lorentz force two axis angular actuator[J]. Japanese Journal of Applied Physics, 2012, 51(6 PART 2).
APA	Sun C.-M.., Wu C.-L.., Wang C.., Chang C.-I.., Yip M.-C.., & Fang W. (2012). Implementation of complementary metal-oxide-semiconductor microelectromechanical systems Lorentz force two axis angular actuator. Japanese Journal of Applied Physics, 51(6 PART 2).
MLA	Sun C.-M.,et al."Implementation of complementary metal-oxide-semiconductor microelectromechanical systems Lorentz force two axis angular actuator".Japanese Journal of Applied Physics 51.6 PART 2(2012).

Files in This Item:
There are no files associated with this item.

If you have any objections to this item, please fill out the form below and the administrator will contact you as soon as possible.
Content:
Email：	*
Affiliation No.
Verification Code:	Refresh

Any comments and suggestions are welcomed.
Title:	*
Content:
Email：	*
Verification Code:	Refresh