| Residential College | false |
| Status | 已發表Published |
| The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film | |
| Hsu C.-P.2; Chen W.-C.2; Tang T.-L.2; Yip M.-C.2; Fang W.2 | |
| 2008-10-24 | |
| Conference Name | IEEE/LEOS International Conference on Optical MEMS and Nanophotonics |
| Source Publication | 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS
 |
| Pages | 152-153 |
| Conference Date | AUG 11-14, 2008 |
| Conference Place | Freiburg, GERMANY |
| Abstract | A simple 2-mask process to realize a two-axis micro scanning mirror is presented. The scanning mirror is made of single-crystal-silicon, and Ni is electroplated at the backside of scanner to induce the magnetostatic driving force. © 2008 IEEE. |
| DOI | 10.1109/OMEMS.2008.4607874 |
| URL | View the original |
| Language | 英語English |
| WOS ID | WOS:000264556700077 |
| Scopus ID | 2-s2.0-54149089712 |
| Fulltext Access | |
| Citation statistics | |
| Document Type | Conference paper |
| Collection | University of Macau |
| Affiliation | 1.National Tsing Hua University 2.Power Mechanical Eng. Dept. |
| Recommended Citation GB/T 7714 | Hsu C.-P.,Chen W.-C.,Tang T.-L.,et al. The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film[C], 2008, 152-153. |
| APA | Hsu C.-P.., Chen W.-C.., Tang T.-L.., Yip M.-C.., & Fang W. (2008). The two-axis magnetostatic-drive single-crystal-si micro scanner driven by back-side electroplating Ni film. 2008 IEEE/LEOS International Conference on Optical MEMS and Nanophotonics, OPT MEMS, 152-153. |
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