Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments

doi:10.1016/j.sna.2005.11.010

Residential College	false
Status	已發表Published
	Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments
	Su W.-S.1; Lee S.-T.1; Lin C.-Y.1; Tsai M.-S.2; Yip M.-C.1; Fang W.1
	2006-08-14
Source Publication	Sensors and Actuators, A: Physical
ISSN	09244247
Volume	130-131 Issue:SPEC. ISS.Pages:553-559
Abstract	This study reports a novel method for tuning the deflection profile of micromachined cantilever by means of multiple plasma surface modification. In short, the shape and curvature of the cantilever can be tuned using the combination of plasma treatments along the beam length and the beam width, respectively. To demonstrate the feasibility of this approach, various NH plasma treatments were employed to tune the deflection profile of cantilevers made of SiO film. The deflection profiles predicted by the simulation and analysis agree with that determined from measurement. © 2005 Elsevier B.V. All rights reserved.
Keyword	Cantilever Beam Curvature Plasma Shape
DOI	10.1016/j.sna.2005.11.010
URL	View the original
Language	英語English
WOS ID	WOS:000239295000076
Scopus ID	2-s2.0-33745853101
Fulltext Access	View Full-Text via DOI View Full-Text via Web of Science View Full-Text via Scopus
Citation statistics
Document Type	Journal article
Collection	University of Macau
Affiliation	1.National Tsing Hua University 2.National Nano Device Laboratories Taiwan
Recommended Citation GB/T 7714	Su W.-S.,Lee S.-T.,Lin C.-Y.,et al. Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments[J]. Sensors and Actuators, A: Physical, 2006, 130-131(SPEC. ISS.), 553-559.
APA	Su W.-S.., Lee S.-T.., Lin C.-Y.., Tsai M.-S.., Yip M.-C.., & Fang W. (2006). Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments. Sensors and Actuators, A: Physical, 130-131(SPEC. ISS.), 553-559.
MLA	Su W.-S.,et al."Tuning the shape and curvature of micromachined cantilevers using multiple plasma treatments".Sensors and Actuators, A: Physical 130-131.SPEC. ISS.(2006):553-559.

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