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Experimental characterization of an embossed capacitive micromachined ultrasonic transducer cell
Yu,Yuanyu1,2; Wang,Jiujiang1,2; Liu,Xin2,3; Pun,Sio Hang2; Zhang,Shuang1; Cheng,Ching Hsiang4; Lei,Kin Fong5,6; Vai,Mang I.2,3; Mak,Peng Un3
2020-02-20
Source PublicationMicromachines
ISSN2072-666X
Volume11Issue:2Pages:217
Abstract

Capacitive Micromachined Ultrasonic Transducer (CMUT) is a promising ultrasonic transducer in medical diagnosis and therapeutic applications that demand a high output pressure. The concept of a CMUT with an annular embossed pattern on a membrane working in collapse mode is proposed to further improve the output pressure. To evaluate the performance of an embossed CMUT cell, both the embossed and uniform membrane CMUT cells were fabricated in the same die with a customized six-mask sacrificial release process. An annular nickel pattern with the dimension of 3 μm x 2 μm (width x height) was formed on a full top electrode CMUT to realize an embossed CMUT cell. Experimental characterization was carried out with optical, electrical, and acoustic instruments on the embossed and uniform CMUT cells. The embossed CMUT cell achieved 27.1% improvement of output pressure in comparison to the uniform CMUT cell biased at 170 V voltage. The fractional bandwidths of the embossed and uniform CMUT cells were 52.5% and 41.8%, respectively. It substantiated that the embossed pattern should be placed at the vibrating center of the membrane for achieving a higher output pressure. The experimental characterization indicated that the embossed CMUT cell has better operational performance than the uniform CMUT cell in collapse region.

KeywordCapacitive Micromachined Ultrasonic Transducer (Cmut) Embossed Cmut Collapse Mode Output Pressure
DOI10.3390/mi11020217
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaChemistry ; Science & Technology - Other Topics ; Instruments & Instrumentation ; Physics
WOS SubjectChemistry, Analytical ; Nanoscience & Nanotechnology ; Instruments & Instrumentation ; Physics, Applied
WOS IDWOS:000520181500106
PublisherMDPI
Scopus ID2-s2.0-85081157383
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionINSTITUTE OF MICROELECTRONICS
Faculty of Science and Technology
THE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
DEPARTMENT OF ELECTRICAL AND COMPUTER ENGINEERING
Corresponding AuthorWang,Jiujiang
Affiliation1.Data Recovery Key Laboratory of Sichuan Province, College of Computer Science and AI, Neijiang Normal University, Neijiang 641100, China
2.State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau 999078, China
3.Department of Electrical and Computer Engineering, Faculty of Science and Technology, University of Macau, Macau 999078, China
4.School of Automotive Engineering, Wuhan University of Technology, Wuhan 430070, China
5.Graduate Institute of Medical Mechatronics, Chang Gung University, Taoyuan 33302, Taiwan
6.Department of Radiation Oncology, Chang Gung Memorial Hospital, Linkou 33305, Taiwan
First Author AffilicationUniversity of Macau
Corresponding Author AffilicationUniversity of Macau
Recommended Citation
GB/T 7714
Yu,Yuanyu,Wang,Jiujiang,Liu,Xin,et al. Experimental characterization of an embossed capacitive micromachined ultrasonic transducer cell[J]. Micromachines, 2020, 11(2), 217.
APA Yu,Yuanyu., Wang,Jiujiang., Liu,Xin., Pun,Sio Hang., Zhang,Shuang., Cheng,Ching Hsiang., Lei,Kin Fong., Vai,Mang I.., & Mak,Peng Un (2020). Experimental characterization of an embossed capacitive micromachined ultrasonic transducer cell. Micromachines, 11(2), 217.
MLA Yu,Yuanyu,et al."Experimental characterization of an embossed capacitive micromachined ultrasonic transducer cell".Micromachines 11.2(2020):217.
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