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Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor
Xu Q.
2015-10-01
Source PublicationIEEE Sensors Journal
ISSN1530-437X
Volume15Issue:10Pages:6017-6026
Abstract

This paper presents the design and fabrication of a new microelectromechanical systems microgripper with integrated electrostatic actuator and capacitive force sensor. One uniqueness of the proposed microgripper is that it possesses a single force sensor which can measure the gripping force and environmental interaction force in two axes in an alternate manner. The gripper structure is devised based on compliant rotary bearing and linear guiding flexure mechanisms, which enable the generation of a compact size. Analytical models are established to facilitate the parametric design of the gripper, which are verified by performing finite-element analysis simulation study. The microgripper is fabricated by the silicon-on-insulator-based process. Experimental calibrations are conducted to demonstrate the gripping and sensing performances. The feasibility and effectiveness of the developed gripper device are validated through the experimental investigations on gripping a human hair. 

KeywordCapacitive Force Sensor Compliant Mechanisms Dual-axis Force Sensing Electrostatic Actuator Microelectromechanical Devices
DOI10.1109/JSEN.2015.2453013
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering ; Instruments & Instrumentation ; Physics
WOS SubjectEngineering, Electrical & Electronic ; Instruments & Instrumentation ; Physics, Applied
WOS IDWOS:000360072500077
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA
The Source to ArticleScopus
Scopus ID2-s2.0-84940094736
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu Q.
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, 999078, Macao
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Xu Q.. Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor[J]. IEEE Sensors Journal, 2015, 15(10), 6017-6026.
APA Xu Q..(2015). Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor. IEEE Sensors Journal, 15(10), 6017-6026.
MLA Xu Q.."Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor".IEEE Sensors Journal 15.10(2015):6017-6026.
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