Residential College | false |
Status | 已發表Published |
Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor | |
Xu Q. | |
2015-10-01 | |
Source Publication | IEEE Sensors Journal |
ISSN | 1530-437X |
Volume | 15Issue:10Pages:6017-6026 |
Abstract | This paper presents the design and fabrication of a new microelectromechanical systems microgripper with integrated electrostatic actuator and capacitive force sensor. One uniqueness of the proposed microgripper is that it possesses a single force sensor which can measure the gripping force and environmental interaction force in two axes in an alternate manner. The gripper structure is devised based on compliant rotary bearing and linear guiding flexure mechanisms, which enable the generation of a compact size. Analytical models are established to facilitate the parametric design of the gripper, which are verified by performing finite-element analysis simulation study. The microgripper is fabricated by the silicon-on-insulator-based process. Experimental calibrations are conducted to demonstrate the gripping and sensing performances. The feasibility and effectiveness of the developed gripper device are validated through the experimental investigations on gripping a human hair. |
Keyword | Capacitive Force Sensor Compliant Mechanisms Dual-axis Force Sensing Electrostatic Actuator Microelectromechanical Devices |
DOI | 10.1109/JSEN.2015.2453013 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Instruments & Instrumentation ; Physics |
WOS Subject | Engineering, Electrical & Electronic ; Instruments & Instrumentation ; Physics, Applied |
WOS ID | WOS:000360072500077 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC, 445 HOES LANE, PISCATAWAY, NJ 08855-4141 USA |
The Source to Article | Scopus |
Scopus ID | 2-s2.0-84940094736 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu Q. |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, 999078, Macao |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Xu Q.. Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor[J]. IEEE Sensors Journal, 2015, 15(10), 6017-6026. |
APA | Xu Q..(2015). Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor. IEEE Sensors Journal, 15(10), 6017-6026. |
MLA | Xu Q.."Design, Fabrication, and Testing of an MEMS Microgripper with Dual-Axis Force Sensor".IEEE Sensors Journal 15.10(2015):6017-6026. |
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