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Lithography-Free Formation of Controllable Microdomes via Droplet Templates for Robust, Ultrasensitive, and Flexible Pressure Sensors
Zhou, Qian1; Ji, Bing1; Chen, Ge1; Ding, Yekai2; Wu, Jinbo2; She, Juncong3; Wang, Shuangpeng1; Zhou, Bingpu1
2019-11-22
Source PublicationACS Applied Nano Materials
ISSN2574-0970
Volume2Issue:11Pages:7178-7187
Abstract

Wearable pressure sensors with excellent flexibility and sensitivity have emerged as a promising field for electronic skin, healthcare monitoring, and so forth. Herein, we report a flexible, tunable resistive pressure sensor based on the carbon powder/polydimethylsiloxane (CPDMS) conductive layer and the microdome-structured PDMS membrane through a simple, lithography-free, and low-cost replication method. The wearable pressure sensor was produced by replicating the dome-shaped structure from water droplets on glass substrate and spray-coating the conductive layer (CPDMS) on the dome-structured membrane afterward. The domes with different heights and bottom diameters for sensor optimization can be simply obtained by regulating the sizes of water droplets sprayed on the glass substrate. The optimized sensor exhibits the high sensitivity of 124 kPa (0-200 Pa), 0.39 kPa (0.2-12 kPa), and 0.02 kPa (12-50 kPa) as well as the detection limit of 2 Pa. Furthermore, the flexible pressure sensor based on the interlocked domed structure was presented as a multifaceted tool to precisely monitor various physical signals or pressure sources, e.g., finger bending/touching, gas flowing, voice vibration, tiny pressure, and so on. We believe that the demonstrated economical methodology can be of profound significance for applications including artificial skins, interactive robotics, flexible electronic devices, and other related fields in the future.

KeywordCarbon Powder Electronic Skin Microdome Polydimethylsiloxane Pressure Sensor
DOI10.1021/acsanm.9b01680
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaScience & Technology - Other Topics ; Materials Science
WOS SubjectNanoscience & Nanotechnology ; Materials Science, Multidisciplinary
WOS IDWOS:000499740800044
Scopus ID2-s2.0-85074651763
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Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding AuthorWu, Jinbo; Zhou, Bingpu
Affiliation1.Joint Key Laboratory of the Ministry of Education, Institute of Applied Physics and Materials Engineering, University of Macau, Taipa, Avenida da Universidade, Macao
2.Materials Genome Institute, Shanghai University, Shanghai, 200444, China
3.State Key Laboratory of Optoelectronic Materials and Technologies, Guangdong Province Key Laboratory of Display Material and Technology, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, China
First Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding Author AffilicationINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Recommended Citation
GB/T 7714
Zhou, Qian,Ji, Bing,Chen, Ge,et al. Lithography-Free Formation of Controllable Microdomes via Droplet Templates for Robust, Ultrasensitive, and Flexible Pressure Sensors[J]. ACS Applied Nano Materials, 2019, 2(11), 7178-7187.
APA Zhou, Qian., Ji, Bing., Chen, Ge., Ding, Yekai., Wu, Jinbo., She, Juncong., Wang, Shuangpeng., & Zhou, Bingpu (2019). Lithography-Free Formation of Controllable Microdomes via Droplet Templates for Robust, Ultrasensitive, and Flexible Pressure Sensors. ACS Applied Nano Materials, 2(11), 7178-7187.
MLA Zhou, Qian,et al."Lithography-Free Formation of Controllable Microdomes via Droplet Templates for Robust, Ultrasensitive, and Flexible Pressure Sensors".ACS Applied Nano Materials 2.11(2019):7178-7187.
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