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1-kV Sputtered p-NiO/n-Ga2O3 Heterojunction Diodes with an Ultra-Low Leakage Current below μ A/cm2
Lu, Xing1; Zhou, Xianda1; Jiang, Huaxing2; Ng, Kar Wei3; Chen, Zimin1; Pei, Yanli1; Lau, Kei May2; Wang, Gang1
2020-01-17
Source PublicationIEEE Electron Device Letters
ISSN0741-3106
Volume41Issue:3Pages:449-452
Abstract

High performance NiO/β-GaO heterojunction pn diodes were realized by applying a sputtered p-type NiO film onto a lightly doped n-type β-GaO epitaxial layer. Taking advantage of the high barrier height against carriers within the pn heterojunction, the demonstrated device exhibited a high breakdown voltage (V)} of 1059 V without optimized electric field management techniques, and before breakdown the reverse leakage current density remained below 1μA/cm. Simultaneously, a relatively low specific on-resistance (R) of 3.5 mΩ· cm was achieved. The built-in potential of the heterojunction that determined by a capacitance-voltage (C-V) measurement was around 2.4 eV. As discussed in terms of the energy band diagram of a type-II heterojunction, the conduction band and valence band offsets at the NiO/β-GaO hetero-interface were estimated to be 1.2 and 2.3 eV, respectively.

KeywordBreakdown Voltage Heterojunction Nio P-n Diode Reverse Leakage Current Β-=ga2o3
DOI10.1109/LED.2020.2967418
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Electrical & Electronic
WOS IDWOS:000519704300035
Scopus ID2-s2.0-85080902972
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Document TypeJournal article
CollectionINSTITUTE OF APPLIED PHYSICS AND MATERIALS ENGINEERING
Corresponding AuthorLu, Xing; Zhou, Xianda
Affiliation1.State Key Laboratory of Optoelectronic Materials and Technologies, School of Electronics and Information Technology, Sun Yat-sen University, Guangzhou, 510275, China
2.Department of Electronic and Computer Engineering, Hong Kong University of Science and Technology, Hong Kong, Hong Kong
3.Institute of Applied Physics and Materials Engineering, University of Macau, Taipa, Macao
Recommended Citation
GB/T 7714
Lu, Xing,Zhou, Xianda,Jiang, Huaxing,et al. 1-kV Sputtered p-NiO/n-Ga2O3 Heterojunction Diodes with an Ultra-Low Leakage Current below μ A/cm2[J]. IEEE Electron Device Letters, 2020, 41(3), 449-452.
APA Lu, Xing., Zhou, Xianda., Jiang, Huaxing., Ng, Kar Wei., Chen, Zimin., Pei, Yanli., Lau, Kei May., & Wang, Gang (2020). 1-kV Sputtered p-NiO/n-Ga2O3 Heterojunction Diodes with an Ultra-Low Leakage Current below μ A/cm2. IEEE Electron Device Letters, 41(3), 449-452.
MLA Lu, Xing,et al."1-kV Sputtered p-NiO/n-Ga2O3 Heterojunction Diodes with an Ultra-Low Leakage Current below μ A/cm2".IEEE Electron Device Letters 41.3(2020):449-452.
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