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Design and analysis of a dual-mode driven parallel XY micromanipulator for micro/nanomanipulations
Tang H.; Li Y.; Huang J.
2012
Source PublicationProceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science
ISSN9544062
Volume226Issue:12Pages:3043
Abstract

This article presents a novel design of a flexure-based, piezoelectric actuated, completely decoupled, high-bandwidth, highresolution, and large stroke parallel XY micromanipulator with two amplification levers. The monolithic mechanism is featured with dual working modes, which meets different kinds of requirements in terms of high resolution and large workspace in micro/nano fields. In order to reduce the displacement loss, the modeling and analysis of bending motion of the levers are conducted; thereafter, compliance and stiffness modeling by employing the matrix method are established. Furthermore, the dynamics modeling and analysis via Lagrange equations are performed to improve the dynamic properties of the mechanism. The simulation results of finite element analysis indicate that the cross-coupling between the two axes is kept to 1.2%; meanwhile, the natural frequency of the mechanism is about 700 Hz, and the amplifier ratio is approximately 2.32. Both theoretical analysis and finite element analysis results well validate the performance of the proposed mechanism. © IMechE 2012.

KeywordAmplification Levers Dual-mode Finite Element Analysis Matrix Method Micromanipulator
DOI10.1177/0954406212442272
URLView the original
Language英語English
WOS IDWOS:000312158600019
The Source to ArticleScopus
Scopus ID2-s2.0-84866915193
Fulltext Access
Citation statistics
Document TypeJournal article
CollectionUniversity of Macau
Recommended Citation
GB/T 7714
Tang H.,Li Y.,Huang J.. Design and analysis of a dual-mode driven parallel XY micromanipulator for micro/nanomanipulations[J]. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 2012, 226(12), 3043.
APA Tang H.., Li Y.., & Huang J. (2012). Design and analysis of a dual-mode driven parallel XY micromanipulator for micro/nanomanipulations. Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science, 226(12), 3043.
MLA Tang H.,et al."Design and analysis of a dual-mode driven parallel XY micromanipulator for micro/nanomanipulations".Proceedings of the Institution of Mechanical Engineers, Part C: Journal of Mechanical Engineering Science 226.12(2012):3043.
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