Residential College | false |
Status | 已發表Published |
Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism | |
Sicong Wan; Qingsong Xu | |
2016 | |
Source Publication | Mechanism and Machine Theory |
ISSN | 0094-114X |
Volume | 95Pages:125-139 |
Abstract | The demand for a compliant micropositioning stage with a large workspace and high precision is increasing. This paper presents a new design of XY micropositioning stage based on Roberts mechanism, which is a traditional linear guiding mechanism. By extending the traditional rigid-body Roberts mechanism, two kinds of new compliant guiding mechanisms are designed and a novel parallel-kinematic XY compliant guiding stage is synthesized. Pseudo-rigid-body model (PRBM) is developed to build the quantitative models of the compliant Roberts mechanisms. In addition, finite-element analysis (FEA) is carried out to validate its performance. A prototype is fabricated and tested through experimental studies. Results show that the XY stage delivers a work range larger than 12 mm in each axis. Moreover, the parasitic motion of the stage in the non-working direction is less than 1.7% of the motion stroke. It indicates that the designed stage meets the requirements of a large stroke and high precision linear guiding mechanism, which demonstrates the feasibility of the proposed design ideas using the Roberts mechanism. |
Keyword | Compliant Mechanism Micropositioning Pseudo Rigid Body Model (Prbm) Roberts Mechanisms Xy Stage |
DOI | 10.1016/j.mechmachtheory.2015.09.003 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering |
WOS Subject | Engineering, Mechanical |
WOS ID | WOS:000363266400010 |
Publisher | PERGAMON-ELSEVIER SCIENCE LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND |
Scopus ID | 2-s2.0-84942936323 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Qingsong Xu |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, Macao |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Sicong Wan,Qingsong Xu. Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism[J]. Mechanism and Machine Theory, 2016, 95, 125-139. |
APA | Sicong Wan., & Qingsong Xu (2016). Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism. Mechanism and Machine Theory, 95, 125-139. |
MLA | Sicong Wan,et al."Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism".Mechanism and Machine Theory 95(2016):125-139. |
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