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Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism
Sicong Wan; Qingsong Xu
2016
Source PublicationMechanism and Machine Theory
ISSN0094-114X
Volume95Pages:125-139
Abstract

The demand for a compliant micropositioning stage with a large workspace and high precision is increasing. This paper presents a new design of XY micropositioning stage based on Roberts mechanism, which is a traditional linear guiding mechanism. By extending the traditional rigid-body Roberts mechanism, two kinds of new compliant guiding mechanisms are designed and a novel parallel-kinematic XY compliant guiding stage is synthesized. Pseudo-rigid-body model (PRBM) is developed to build the quantitative models of the compliant Roberts mechanisms. In addition, finite-element analysis (FEA) is carried out to validate its performance. A prototype is fabricated and tested through experimental studies. Results show that the XY stage delivers a work range larger than 12 mm in each axis. Moreover, the parasitic motion of the stage in the non-working direction is less than 1.7% of the motion stroke. It indicates that the designed stage meets the requirements of a large stroke and high precision linear guiding mechanism, which demonstrates the feasibility of the proposed design ideas using the Roberts mechanism.

KeywordCompliant Mechanism Micropositioning Pseudo Rigid Body Model (Prbm) Roberts Mechanisms Xy Stage
DOI10.1016/j.mechmachtheory.2015.09.003
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaEngineering
WOS SubjectEngineering, Mechanical
WOS IDWOS:000363266400010
PublisherPERGAMON-ELSEVIER SCIENCE LTD, THE BOULEVARD, LANGFORD LANE, KIDLINGTON, OXFORD OX5 1GB, ENGLAND
Scopus ID2-s2.0-84942936323
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Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorQingsong Xu
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, Macao
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Sicong Wan,Qingsong Xu. Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism[J]. Mechanism and Machine Theory, 2016, 95, 125-139.
APA Sicong Wan., & Qingsong Xu (2016). Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism. Mechanism and Machine Theory, 95, 125-139.
MLA Sicong Wan,et al."Design and analysis of a new compliant XY micropositioning stage based on Roberts mechanism".Mechanism and Machine Theory 95(2016):125-139.
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