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Boundary conditions analysis of circular capacitive micromachined ultrasonic transducer (CMUT) devices
Wang, Jiujiang1,2; Yu, Yuanyu1,2; Kuang, Jiangming1,2; Zhang, Shuang1,2; Xu, Jing1,2; Liu, Xin3
2021
MediaRecent Patents on Engineering
DOI10.2174/1872212115999210101124611
KeywordAnalytical Solution Cmut Elastic Support Boundary Condition (Bc) Fabrication Method Fixed Bc Governing Equations
Language英語English
URLView the original
Scopus ID2-s2.0-85105765410
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Document TypeOther
CollectionTHE STATE KEY LABORATORY OF ANALOG AND MIXED-SIGNAL VLSI (UNIVERSITY OF MACAU)
Affiliation1.Data Recovery Key Laboratory of Sichuan Province, College of Computer Science, Neijiang Normal University, Nei-jiang, 641100, China
2.BeiDou and Wisdom Medical Doctor Workstation, Neijiang Normal University, Neijiang, 641110, China
3.State Key Laboratory of Analog and Mixed-Signal VLSI, University of Macau, Macau, 999078, China
Recommended Citation
GB/T 7714
Wang, Jiujiang,Yu, Yuanyu,Kuang, Jiangming,et al. Boundary conditions analysis of circular capacitive micromachined ultrasonic transducer (CMUT) devices. 2021-01-01.
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