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Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure Conference paper
Zeyi Wu, Qingsong Xu. Design and optimization of a compact XY parallel micro/nano-positioning stage with stacked structure[C], 2018, 558-563.
Authors:  Zeyi Wu;  Qingsong Xu
Favorite | TC[WOS]:2 TC[Scopus]:2 | Submit date:2018/12/23
Fea Analysis  Mechanism Design  Micro/nano-positioning  Parameter Optimization  Stacked Structure