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Faculties & Institutes
Faculty of Scien... [1]
Authors
MAK PENG UN [1]
Document Type
Journal article [2]
Conference paper [1]
Date Issued
1997 [1]
1992 [2]
Language
英語English [3]
Source Publication
Journal of Vacuu... [3]
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Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge
Journal article
Mak P., Asmussen J.. Experimental investigation of the matching and impressed electric field of a multipolar electron cyclotron resonance discharge[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1997, 15(1), 154-168.
Authors:
Mak P.
;
Asmussen J.
Favorite
|
TC[WOS]:
11
TC[Scopus]:
12
|
Submit date:2019/03/01
Ion and neutral energies in a multipolar electron cyclotron resonance plasma source
Journal article
King G., Sze F.C., Mak P., Grotjohn T.A., Asmussen J.. Ion and neutral energies in a multipolar electron cyclotron resonance plasma source[J]. Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films, 1992, 10(4), 1265-1269.
Authors:
King G.
;
Sze F.C.
;
Mak P.
;
Grotjohn T.A.
;
Asmussen J.
Favorite
|
TC[WOS]:
35
TC[Scopus]:
29
|
Submit date:2019/03/01
Investigation of the influence of electromagnetic excitation on electron cyclotron resonance discharge properties
Conference paper
Mak P., King G., Grotjohn T.A., Asmussen J.. Investigation of the influence of electromagnetic excitation on electron cyclotron resonance discharge properties[C], 1992, 1281-1287.
Authors:
Mak P.
;
King G.
;
Grotjohn T.A.
;
Asmussen J.
Favorite
|
TC[WOS]:
22
TC[Scopus]:
19
|
Submit date:2019/03/01