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Faculty of Scien... [1]
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VALENTINO ANOK M... [1]
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Journal article [2]
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2025 [1]
2011 [1]
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英語English [2]
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Tribology Intern... [2]
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Experimental study of key factors on super smooth surface fabrication upon single crystal silicon based on mechanochemical synergy
Journal article
Shen, Xiao, Weng, Xiaoyu, Li, Yancheng, Tian, Ye, Peng, Xing, Xiong, Ying, Qiao, Shuo, Shi, Feng. Experimental study of key factors on super smooth surface fabrication upon single crystal silicon based on mechanochemical synergy[J]. Tribology International, 2025, 201.
Authors:
Shen, Xiao
;
Weng, Xiaoyu
;
Li, Yancheng
;
Tian, Ye
;
Peng, Xing
; et al.
Favorite
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TC[WOS]:
0
TC[Scopus]:
0
IF:
6.1
/
5.7
|
Submit date:2025/01/22
Chemical Mechanical Polishing
Low Defect Processing
Optical Elements And Wafer
Real Contact Pressure Control
Super Smooth Surface
Surface roughness and material strength of tribo-pairs in ring compression tests
Journal article
V.A.M. Cristino, P.A.R. Rosa, P.A.F. Martins. Surface roughness and material strength of tribo-pairs in ring compression tests[J]. Tribology International, 2011, 44(2), 134-143.
Authors:
V.A.M. Cristino
;
P.A.R. Rosa
;
P.A.F. Martins
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TC[WOS]:
18
TC[Scopus]:
23
IF:
6.1
/
5.7
|
Submit date:2019/03/28
Coefficient Of Friction
Material Strength
Ring Compression Test
Surface Roughness