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Experimental study of key factors on super smooth surface fabrication upon single crystal silicon based on mechanochemical synergy Journal article
Shen, Xiao, Weng, Xiaoyu, Li, Yancheng, Tian, Ye, Peng, Xing, Xiong, Ying, Qiao, Shuo, Shi, Feng. Experimental study of key factors on super smooth surface fabrication upon single crystal silicon based on mechanochemical synergy[J]. Tribology International, 2025, 201.
Authors:  Shen, Xiao;  Weng, Xiaoyu;  Li, Yancheng;  Tian, Ye;  Peng, Xing; et al.
Favorite | TC[WOS]:0 TC[Scopus]:0  IF:6.1/5.7 | Submit date：2025/01/22
Chemical Mechanical Polishing  Low Defect Processing  Optical Elements And Wafer  Real Contact Pressure Control  Super Smooth Surface