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Faculty of Scien... [1]
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MAK PENG UN [1]
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Journal article [1]
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1996 [1]
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英語English [1]
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Journal of Vacuu... [1]
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Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control
Journal article
Mak, P. U., Tsai, M.-H., Natarajan, J., Wright, B., Grotjohn, T., Salam, F., Siegel, M., Asmussen, J.. Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control[J]. Journal of Vacuum Science & Technology A, 1996, 1894-1900.
Authors:
Mak, P. U.
;
Tsai, M.-H.
;
Natarajan, J.
;
Wright, B.
;
Grotjohn, T.
; et al.
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Submit date：2022/09/01
Sensors And Plasma Processing Control Model
