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Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation
Journal article
Xi, Jingqian, Zheng, Zhuoyue, Liu, Huafeng, Zhang, Pan, Zhao, Chun, Wang, Yuan, Wang, Chen, Kraft, Michael, Martins, Rui P., Mak, Pui In. Towards True In-situ Temperature Compensation Utilizing Multiple Parameter Decoupling for Resonant MEMS Sensors Subject to Blue Sideband Excitation[J]. IEEE Sensors Letters, 2024, 8(4), 2500804.
Authors:
Xi, Jingqian
;
Zheng, Zhuoyue
;
Liu, Huafeng
;
Zhang, Pan
;
Zhao, Chun
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
2.2
/
2.2
|
Submit date:2024/05/02
Blue-sideband Excitation (Bse)
Mechanical Sensors
Multiple Parameter Decoupling (Mpd)
Resonant Sensor
Temperature Compensation
Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications
Review article
2024
Authors:
Zheng, Zhuoyue
;
Wang, Chen
;
Wang, Linlin
;
Ji, Zeyu
;
Song, Xiaoxiao
; et al.
Favorite
|
TC[WOS]:
4
TC[Scopus]:
6
IF:
3.0
/
3.0
|
Submit date:2024/05/16
Capacitive Microphone
Directional Microphone
Environmental Noise-cancelling
Mems Microphone
Piezoelectric Microphone