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An Improved Static Membrane Deflection Analysis for Collapse Mode CMUT Fabricated by Sacrificial Release Method
Journal article
Jiujiang Wang, Xin Liu, Yuanyu Yu, Ching-Hsiang Cheng, Kin Fong Lei, Peng Un Mak, Mang I Vai, Sio Hang Pun. An Improved Static Membrane Deflection Analysis for Collapse Mode CMUT Fabricated by Sacrificial Release Method[J]. IEEE Sensors Journal, 2023, 23(3), 2364-2374.
Authors:
Jiujiang Wang
;
Xin Liu
;
Yuanyu Yu
;
Ching-Hsiang Cheng
;
Kin Fong Lei
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
0
IF:
4.3
/
4.2
|
Submit date:2023/03/06
Analytical Analysis
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Collapse Mode
Deflection
Substrate Supporting Effect
Supporting Post Bending Effect
Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release
Conference paper
Che, U. Kin, Liu, Xin, Yu, Yuanyu, Wang, Jiujiang, Pun, Sio Hang, Chen, Fei, Mak, Peng Un, Vai, Mang I.. Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release[C]. El-Hashash A.:SPIE, 2022, 1245807.
Authors:
Che, U. Kin
;
Liu, Xin
;
Yu, Yuanyu
;
Wang, Jiujiang
;
Pun, Sio Hang
; et al.
Favorite
|
TC[Scopus]:
0
|
Submit date:2023/01/30
Ashing
Capacitive Micromachined Ultrasonic Transducer
Polysilicon
Sacrificial Layer Release
Stress
Use of Supporting Post Width to Increase the CMUT's Resonant Frequency
Journal article
Wang, Jiujiang, Pun, Sio Hang, Yu, Yuanyu, Liu, Yihe, Cheng, Ching Hsiang, Lei, Kin Fong, Zhang, Shuang, Mak, Peng Un, Vai, Mang I.. Use of Supporting Post Width to Increase the CMUT's Resonant Frequency[J]. IEEE Access, 2022, 10, 59219-59227.
Authors:
Wang, Jiujiang
;
Pun, Sio Hang
;
Yu, Yuanyu
;
Liu, Yihe
;
Cheng, Ching Hsiang
; et al.
Favorite
|
TC[WOS]:
4
TC[Scopus]:
4
IF:
3.4
/
3.7
|
Submit date:2022/08/05
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Resonant Frequency
Supporting Post Width
Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency
Journal article
Wang, Jiujiang, Pun, Sio Hang, Yu, Yuanyu, Liu, Yihe, Cheng, Ching Hsiang, Lei, Kin Fong, Zhang, Shuang, Mak, Peng Un, Vai, Mang I.. Use of Supporting Post Width to Increase the CMUT’s Resonant Frequency[J]. IEEE Access, 2022, 10, 59219 - 59227.
Authors:
Wang, Jiujiang
;
Pun, Sio Hang
;
Yu, Yuanyu
;
Liu, Yihe
;
Cheng, Ching Hsiang
; et al.
Favorite
|
TC[WOS]:
4
TC[Scopus]:
4
IF:
3.4
/
3.7
|
Submit date:2022/08/07
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Resonant Frequency
Supporting Post Width
A review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections
Journal article
Wang, Jiujiang, Liu, Xin, Yu, Yuanyu, Li, Yao, Cheng, Ching Hsiang, Zhang, Shuang, Mak, Peng Un, Vai, Mang I., Pun, Sio Hang. A review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections[J]. Micromachines, 2021, 12(6), 714.
Authors:
Wang, Jiujiang
;
Liu, Xin
;
Yu, Yuanyu
;
Li, Yao
;
Cheng, Ching Hsiang
; et al.
Favorite
|
TC[WOS]:
5
TC[Scopus]:
7
IF:
3.0
/
3.0
|
Submit date:2021/12/08
Analytical Modeling
Capacitive Micromachined Ultrasonic Transducer ((Cmut)
Collapse Mode
Collapse Voltage
Membrane Deflection
Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging
Journal article
Yu, Yuanyu, Wang, Jiujiang, Liu, Xin, Pun, Sio H., Qiu, Weibao, Zhang, Shuang, Cheng, Ching H., Lei, Kin F., Vai, Mang I., Mak, Peng U.. Design and experiment of capacitive micromachined ultrasonic transducer array for high-frequency underwater imaging[J]. Recent Advances in Electrical and Electronic Engineering, 2021, 14(2), 233-240.
Authors:
Yu, Yuanyu
;
Wang, Jiujiang
;
Liu, Xin
;
Pun, Sio H.
;
Qiu, Weibao
; et al.
Favorite
|
TC[WOS]:
0
TC[Scopus]:
1
IF:
0.6
/
0.4
|
Submit date:2022/05/13
Capacitive Micromachined Ultrasonic Transducer
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Device Design
Sacrificial Release Process
Underwater Imaging
Zirconate Titanate
Experimental characterization of an embossed capacitive micromachined ultrasonic transducer cell
Journal article
Yu,Yuanyu, Wang,Jiujiang, Liu,Xin, Pun,Sio Hang, Zhang,Shuang, Cheng,Ching Hsiang, Lei,Kin Fong, Vai,Mang I., Mak,Peng Un. Experimental characterization of an embossed capacitive micromachined ultrasonic transducer cell[J]. Micromachines, 2020, 11(2), 217.
Authors:
Yu,Yuanyu
;
Wang,Jiujiang
;
Liu,Xin
;
Pun,Sio Hang
;
Zhang,Shuang
; et al.
Favorite
|
TC[WOS]:
5
TC[Scopus]:
8
IF:
3.0
/
3.0
|
Submit date:2021/03/11
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Embossed Cmut
Collapse Mode
Output Pressure
Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process
Journal article
Yu,Yuanyu, Wang,Jiujiang, Pun,Sio Hang, Cheng,Ching Hsiang, Lei,Kin Fong, Vai,Mang I., Zhang,Shuang, Mak,Peng Un. Fabrication of embossed capacitive micromachined ultrasonic transducers using sacrificial release process[J]. IEICE Electronics Express, 2019, 16(2).
Authors:
Yu,Yuanyu
;
Wang,Jiujiang
;
Pun,Sio Hang
;
Cheng,Ching Hsiang
;
Lei,Kin Fong
; et al.
Favorite
|
TC[WOS]:
3
TC[Scopus]:
5
IF:
0.8
/
0.7
|
Submit date:2021/03/11
Embossed Capacitive Micromachined Ultrasonic Transducer
Nickel Electroplating
Sacrificial Release Process
Monolithic Multiband CMUTs for Photoacoustic Computed Tomography with In Vivo Biological Tissue Imaging
Journal article
Pun, Sio Hang, Yu, Yuanyu, Zhang, Jian, Wang, Jiujiang, Cheng, Ching-Hsiang, Lei, Kin Fong, Yuan, Zhen, Mak, Peng Un. Monolithic Multiband CMUTs for Photoacoustic Computed Tomography with In Vivo Biological Tissue Imaging[J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2018, 65(3), 465-475.
Authors:
Pun, Sio Hang
;
Yu, Yuanyu
;
Zhang, Jian
;
Wang, Jiujiang
;
Cheng, Ching-Hsiang
; et al.
Favorite
|
TC[WOS]:
27
TC[Scopus]:
31
IF:
3.0
/
2.9
|
Submit date:2018/12/17
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Multiband Cmut
Photoacoustic Computed Tomography (Pact)
Monolithic Multiband CMUTs for Photoacoustic Computed Tomography With In VivoBiological Tissue Imaging
Journal article
Sio Hang Pun, Yuanyu Yu, Jian Zhang, Jiujiang Wang, Ching-Hsiang Cheng,, Kin Fong Lei, Zhen Yuan, Peng Un Mak. Monolithic Multiband CMUTs for Photoacoustic Computed Tomography With In VivoBiological Tissue Imaging[J]. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 2018, 65(3), 465-475.
Authors:
Sio Hang Pun
;
Yuanyu Yu
;
Jian Zhang
;
Jiujiang Wang
;
Ching-Hsiang Cheng,
; et al.
Adobe PDF
|
Favorite
|
TC[WOS]:
27
TC[Scopus]:
31
IF:
3.0
/
2.9
|
Submit date:2022/08/21
Capacitive Micromachined Ultrasonic Transducer (Cmut)
Multiband Cmut
Photoacoustic Computed Tomography (Pact)