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INSTITUTE OF MIC... [1]
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PUN SIO HANG [1]
MAK PENG UN [1]
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Conference paper [1]
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2016 [1]
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英語English [1]
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2016 IEEE Intern... [1]
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An accurate design to calculate and measure the capacitance of CMUT for pressure sensors
Conference paper
Wang, Jiujiang, Yu, Yuanyu, Pun, Sio Hang, Gao, Yueming, Che, U. Kin, Mak, Peng Un. An accurate design to calculate and measure the capacitance of CMUT for pressure sensors[C], 2016.
Authors:
Wang, Jiujiang
;
Yu, Yuanyu
;
Pun, Sio Hang
;
Gao, Yueming
;
Che, U. Kin
; et al.
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Submit date：2019/02/14
Cmut
Deflection Profile
Capacitance
Pressure Sensor
