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The design and application of electron cyclotron resonance discharges Journal article
Asmussen Jr. J., Grotjohn T.A., Mak P., Perrin M.A.. The design and application of electron cyclotron resonance discharges[J]. IEEE Transactions on Plasma Science, 1997, 25(6), 1196-1221.
Authors:  Asmussen Jr. J.;  Grotjohn T.A.;  Mak P.;  Perrin M.A.
Favorite | TC[WOS]:47 TC[Scopus]:58 | Submit date：2019/03/01
Ecr Microwave Discharges  High-density Plasma Sources  Plasma Processing  
Experimental Measurement of the Impressed Electric Field in a Mutlipolar Electron Cyclotron Resonance Plasma Source Conference paper
Mak, P. U., Asmussen, J.. Experimental Measurement of the Impressed Electric Field in a Mutlipolar Electron Cyclotron Resonance Plasma Source[C], 1995.
Authors:  Mak, P. U.;  Asmussen, J.
Favorite |  | Submit date：2022/09/01
Impressed electric field  ECR plasma source  
Investigation of the Influence of Electromagnetic Excitation on Electron Cyclotron Resonance Discharge Performance Journal article
Mak, P. U., King, G., Grotjohn, T., Asmussen, J.. Investigation of the Influence of Electromagnetic Excitation on Electron Cyclotron Resonance Discharge Performance[J]. Journal of Vacuum Science & Technology A, 1992, A10, 2181-2187.
Authors:  Mak, P. U.;  King, G.;  Grotjohn, T.;  Asmussen, J.
Favorite | TC[WOS]:22 TC[Scopus]:19  IF:2.4/2.6 | Submit date：2022/09/01
Ecr Plasma