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Faculty of Scien... [1]
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MAK PENG UN [1]
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Journal article [1]
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1997 [1]
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英語English [1]
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J. Vac. Sci. Tec... [1]
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Experimental Investigation of the Matching and Impressed Electric Fields of a Multipolar ECR Discharge
Journal article
Mak, P. U., Asmussen, J.. Experimental Investigation of the Matching and Impressed Electric Fields of a Multipolar ECR Discharge[J]. J. Vac. Sci. Technol., A, 1997, 154-168.
Authors:
Mak, P. U.
;
Asmussen, J.
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Submit date：2022/09/01
Em Field In Plasma
Reactor Design And Global Plasma Model
