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Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography Journal article
Li, Mingjie, Luo, Wenxin, Xu, Jingfu, Zhang, Juan, Ng, Kar Wei, Cheng, Xing. Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography[J]. Microelectronic Engineering, 2022, 256, 111722.
Authors:  Li, Mingjie;  Luo, Wenxin;  Xu, Jingfu;  Zhang, Juan;  Ng, Kar Wei; et al.
Favorite | TC[WOS]:1 TC[Scopus]:2  IF:2.6/2.5 | Submit date：2022/03/04
Electrodeposition  Imprint Lithography  Oxidation  Sputtering  
Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography Journal article
Li, M, Luo, W, Xu, J, Zhang, J, Ng, K. W., Cheng, X. Fabrication and oxidation of amorphous Zr-based alloy for imprint lithography[J]. Microelectronic Engineering, 2022, 111722-111722.
Authors:  Li, M;  Luo, W;  Xu, J;  Zhang, J;  Ng, K. W.; et al.
Favorite | TC[WOS]:1 TC[Scopus]:2  IF:2.6/2.5 | Submit date：2022/08/01
Imprint Lithography  Sputtering  Electrodeposition  Oxidation