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VAI MANG I [1]
PUN SIO HANG [1]
MAK PENG UN [1]
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Journal article [1]
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2021 [1]
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英語English [1]
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Micromachines [1]
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A review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections
Journal article
Wang, Jiujiang, Liu, Xin, Yu, Yuanyu, Li, Yao, Cheng, Ching Hsiang, Zhang, Shuang, Mak, Peng Un, Vai, Mang I., Pun, Sio Hang. A review on analytical modeling for collapse mode capacitive micromachined ultrasonic transducer of the collapse voltage and the static membrane deflections[J]. Micromachines, 2021, 12(6), 714.
Authors:
Wang, Jiujiang
;
Liu, Xin
;
Yu, Yuanyu
;
Li, Yao
;
Cheng, Ching Hsiang
; et al.
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Submit date：2021/12/08
Analytical Modeling
Capacitive Micromachined Ultrasonic Transducer ((Cmut)
Collapse Mode
Collapse Voltage
Membrane Deflection
