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THE STATE KEY LA... [1]
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2024 [1]
2011 [2]
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英語English [3]
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2011 16th Intern... [1]
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Micro-Electro-Mechanical Systems Microphones: A Brief Review Emphasizing Recent Advances in Audible Spectrum Applications
Review article
2024
Authors:
Zheng, Zhuoyue
;
Wang, Chen
;
Wang, Linlin
;
Ji, Zeyu
;
Song, Xiaoxiao
; et al.
Favorite
|
TC[WOS]:
5
TC[Scopus]:
7
IF:
3.0
/
3.0
|
Submit date:2024/05/16
Capacitive Microphone
Directional Microphone
Environmental Noise-cancelling
Mems Microphone
Piezoelectric Microphone
Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm
Conference paper
Huang C.-H., Tsai M.-H., Lee C.-H., Hsieh T.-M., Liou J.-C., Chen L.-C., Yip M.-C., Fang W.. Design and implementation of a novel CMOS MEMS condenser microphone with corrugated diaphragm[C], 2011, 1026-1029.
Authors:
Huang C.-H.
;
Tsai M.-H.
;
Lee C.-H.
;
Hsieh T.-M.
;
Liou J.-C.
; et al.
Favorite
|
TC[Scopus]:
2
|
Submit date:2019/04/08
Cmos-mems
Condenser Microphone
Corrugated
Diaphragm
Sensitivity
Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate
Journal article
Huang C.-H., Lee C.-H., Hsieh T.-M., Tsao L.-C., Wu S., Liou J.-C., Wang M.-Y., Chen L.-C., Yip M.-C., Fang W.. Implementation of the CMOS MEMS condenser microphone with corrugated metal diaphragm and silicon back-plate[J]. Sensors, 2011, 11(6), 6257-6269.
Authors:
Huang C.-H.
;
Lee C.-H.
;
Hsieh T.-M.
;
Tsao L.-C.
;
Wu S.
; et al.
Favorite
|
TC[WOS]:
35
TC[Scopus]:
39
|
Submit date:2019/04/08
Cmos-mems
Condenser Microphone
Corrugated
Diaphragm
Sensitivity