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The design and application of electron cyclotron resonance discharges Journal article
Asmussen Jr. J., Grotjohn T.A., Mak P., Perrin M.A.. The design and application of electron cyclotron resonance discharges[J]. IEEE Transactions on Plasma Science, 1997, 25(6), 1196-1221.
Authors:  Asmussen Jr. J.;  Grotjohn T.A.;  Mak P.;  Perrin M.A.
Favorite | TC[WOS]:47 TC[Scopus]:58 | Submit date：2019/03/01
Ecr Microwave Discharges  High-density Plasma Sources  Plasma Processing  
Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control Journal article
Mak, P. U., Tsai, M.-H., Natarajan, J., Wright, B., Grotjohn, T., Salam, F., Siegel, M., Asmussen, J.. Investigation of Multipolar ECR Plasma Source Sensors and Models for Plasma Control[J]. Journal of Vacuum Science & Technology A, 1996, 1894-1900.
Authors:  Mak, P. U.;  Tsai, M.-H.;  Natarajan, J.;  Wright, B.;  Grotjohn, T.; et al.
Favorite |   IF:2.4/2.6 | Submit date：2022/09/01
Sensors And Plasma Processing Control Model