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2015 [1]
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Sensors and Actu... [1]
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Resorcinol-formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor
Journal article
Chung V.P.J., Yip M.-C., Fang W.. Resorcinol-formaldehyde aerogels for CMOS-MEMS capacitive humidity sensor[J]. Sensors and Actuators, B: Chemical, 2015, 214, 181-188.
Authors:
Chung V.P.J.
;
Yip M.-C.
;
Fang W.
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TC[WOS]:
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Submit date：2019/04/08
Cmos-mems
Humidity Sensor
Resorcinol-formaldehyde Aerogels
