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Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release Conference paper
Che, U. Kin, Liu, Xin, Yu, Yuanyu, Wang, Jiujiang, Pun, Sio Hang, Chen, Fei, Mak, Peng Un, Vai, Mang I.. Fabrication of CMUTs Using Sacrificial Release Process with Ashing Assisted Polysilicon Release[C]. El-Hashash A.:SPIE, 2022, 1245807.
Authors:  Che, U. Kin;  Liu, Xin;  Yu, Yuanyu;  Wang, Jiujiang;  Pun, Sio Hang; et al.
Favorite | TC[Scopus]:0 | Submit date：2023/01/30
Ashing  Capacitive Micromachined Ultrasonic Transducer  Polysilicon  Sacrificial Layer Release  Stress  
A fast and low-cost microfabrication approach for six types of thermoplastic substrates with reduced feature size and minimized bulges using sacrificial layer assisted laser engraving Journal article
Gu, Longjun, Yu, Guodong, Li, Cheuk-Wing. A fast and low-cost microfabrication approach for six types of thermoplastic substrates with reduced feature size and minimized bulges using sacrificial layer assisted laser engraving[J]. ANALYTICA CHIMICA ACTA, 2018, 997, 24-34.
Authors:  Gu, Longjun;  Yu, Guodong;  Li, Cheuk-Wing
Favorite | TC[WOS]:9 TC[Scopus]:10  IF:5.7/5.5 | Submit date：2018/10/30
Co2 Laser  Thermoplastics  Sacrificial Layer  Reduced Feature Size  Minimized Bulge Height  High Aspect Ratio