| Status | 已發表Published |
| Design and Anlysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage | |
Zhang, X. ; Xu, Q. 
| |
| 2016-08-01 | |
| Source Publication | Proceedings of 2016 International Conference on Advanced Robotics and Mechatronics (ICARM)
 |
| Pages | 359-363 |
| Publisher | IEEE |
| Abstract | This paper reports on a conceptual design for a modular XYZ micro/nano-positioning stage by employing bridge amplified flexure mechanism and piezoelectric actuators. The mechanism design and analysis of a new terse parallel flexure stage with three translational degrees-of-freedom (DOF) is presented. The FEA simulation of dynamics analysis and fatigue analysis are conducted to reveal the capacity of the stage. Due to a larger enlargement ratio of the amplifier of bridge type and prismatic joints with good decoupling property, the XYZ micro/nano-positioning stage exhibits a large almost-decoupled motion along three working axes. Moreover, the application of modular design reduces the cost for repair and replacing. The capacities of the reported design are validated by performing simulation study. |
| Keyword | Micro/Nano-Positioning mechanism design xyz stage |
| URL | View the original |
| Language | 英語English |
| The Source to Article | PB_Publication |
| PUB ID | 28489 |
| Document Type | Conference paper |
| Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
| Corresponding Author | Xu, Q. |
| Recommended Citation GB/T 7714 | Zhang, X.,Xu, Q.. Design and Anlysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage[C]:IEEE, 2016, 359-363. |
| APA | Zhang, X.., & Xu, Q. (2016). Design and Anlysis of an In-Plane Flexure XYZ Micro/Nano-Positioning Stage. Proceedings of 2016 International Conference on Advanced Robotics and Mechatronics (ICARM), 359-363. |
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