Residential College | false |
Status | 已發表Published |
Design of a New Compliant XY Micropositioning Stage Based on Roberts Mechanism | |
Wan, S.![]() ![]() ![]() | |
2014-10-01 | |
Conference Name | 2014 International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO) |
Source Publication | Proceedings of The 4th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO 2014)
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Pages | 173-178 |
Conference Date | OCT 27-31, 2014 |
Conference Place | Taipei, TAIWAN |
Publisher | IEEE |
Abstract | Compliant micro-positioning mechanisms play an important role in precise positioning and displacement technology. In this paper, a new kind of compliant mechanism based on Roberts mechanisms is proposed for the mechanism design of a novel parallel-kinematic XY micro-positioning stage. Pseudo-rigid-body model (PRBM) is developed to establish the quantitative models, which show that the XY stage has a work range larger than 14 mm in each axis with a relative compact dimension. Moreover, the stage performances are verified by conducting finite-element analysis (FEA) simulation. Results not only validate the analytical models, but also demonstrate the nice decoupling performance of the designed XY stage. The FEA simulation results show that the parasitic motion in the nonworking direction was less than 0.1% of the motion stroke. It indicates that the proposed design meets the requirements of a large stroke, high precision linear guiding mechanism. A prototype XY stage is fabricated for further investigation. |
Keyword | Compliant Mechanism Xy Stage Pseudo Rigid Body Model (Prbm) Roberts Mechanisms Micro-positioning |
DOI | 10.1016/j.mechmachtheory.2015.09.003 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Science & Technology - Other Topics |
WOS Subject | Nanoscience & Nanotechnology |
WOS ID | WOS:000380389000045 |
The Source to Article | PB_Publication |
Scopus ID | 2-s2.0-84942936323 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu, Q. |
Recommended Citation GB/T 7714 | Wan, S.,Xu, Q.. Design of a New Compliant XY Micropositioning Stage Based on Roberts Mechanism[C]:IEEE, 2014, 173-178. |
APA | Wan, S.., & Xu, Q. (2014). Design of a New Compliant XY Micropositioning Stage Based on Roberts Mechanism. Proceedings of The 4th International Conference on Manipulation, Manufacturing and Measurement on the Nanoscale (3M-NANO 2014), 173-178. |
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