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Design and Implementation of a Novel Compliant Rotary Micropositioning Stage Driven by Linear Voice Coil Motor
Xu, Q.
2013-05-01
Source PublicationReview of Scientific Instruments
ISSN0034-6748
Pages055001-1-055001-8
Abstract

Limited-angle rotary micropositioning stages are required in precision engineering applications where an ultrahigh-precision rotational motion within a restricted range is needed. This paper presents the design, fabrication, and control of a compliant rotary micropositioning stage dedicated to the said applications. To tackle the challenge of achieving both a large rotational range and a compact size, a new idea of multi-stage compound radial flexure is proposed. A compact rotary stage is devised to deliver an over 10° rotational range while possessing a negligible magnitude of center shift. The stage is driven by a linear voice coil motor and its output motion is measured by laser displacement sensors. Analytical models are derived to facilitate the parametric design, which is validated by conducting finite element analysis. The actuation and sensing issues are addressed to guarantee the stage performance. A prototype is fabricated and a proportional-integral-derivative control is implemented to achieve a precise positioning. Experimental results demonstrate a resolution of 2 μrad over 10° rotational range as well as a low level of center shift of the rotary micropositioning system.

KeywordCompliance Control Displacement Measurement Finite Element Analysis Measurement By Laser Beam Micropositioning Motion Measurement Precision Engineering Three-term Control
DOI10.1063/1.4803187
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaInstruments & Instrumentation ; Physics
WOS SubjectInstruments & Instrumentation ; Physics, Applied
WOS IDWOS:000319999300057
The Source to ArticlePB_Publication
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Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu, Q.
Recommended Citation
GB/T 7714
Xu, Q.. Design and Implementation of a Novel Compliant Rotary Micropositioning Stage Driven by Linear Voice Coil Motor[J]. Review of Scientific Instruments, 2013, 055001-1-055001-8.
APA Xu, Q..(2013). Design and Implementation of a Novel Compliant Rotary Micropositioning Stage Driven by Linear Voice Coil Motor. Review of Scientific Instruments, 055001-1-055001-8.
MLA Xu, Q.."Design and Implementation of a Novel Compliant Rotary Micropositioning Stage Driven by Linear Voice Coil Motor".Review of Scientific Instruments (2013):055001-1-055001-8.
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