UM  > Faculty of Science and Technology  > DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Status已發表Published
Tracking Performance Characterization and Improvement of a Piezoactuated Micropositioning System Based on an Empirical Index,
Xu, Q.; Li, Y. M.
2010-12-01
Source PublicationRobotics and Computer-Integrated Manufacturing
ISSN0736-5845
Pages744-752
AbstractMotion tracking is an important problem in micropositioning systems dedicated to ultra-precision robotic micromanipulation. This paper investigates the periodic motion tracking performance of a micropositioning system based on an empirical tracking performance index (TPI), which is proposed with the consideration of both tracking errors and tracking frequencies. To improve the TPI of a micropositioning system with piezoelectric actuation, a two-loop controller consisting of an robust controller and a disturbance observer is implemented. Experimental studies are conducted on an XY parallel micropositioning system for the motion tracking tests. Results demonstrate that a sole robust controller is insufficient to produce a satisfactory tracking performance with low-frequency control. In contrast, the two-loop controller endows the system with both a lower tracking error and a better TPI than the conventional robust control does. The experimental results not only validate the effectiveness of the proposed control method in improving tracking performance but also confirm the feasibility of the TPI in quantitatively characterizing the performance of a micropositioning system.
KeywordMicromanipulator Piezoelectric actuation System identification Robust control Motion control Performance characterization
URLView the original
Language英語English
The Source to ArticlePB_Publication
PUB ID36300
Document TypeJournal article
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Recommended Citation
GB/T 7714
Xu, Q.,Li, Y. M.. Tracking Performance Characterization and Improvement of a Piezoactuated Micropositioning System Based on an Empirical Index,[J]. Robotics and Computer-Integrated Manufacturing, 2010, 744-752.
APA Xu, Q.., & Li, Y. M. (2010). Tracking Performance Characterization and Improvement of a Piezoactuated Micropositioning System Based on an Empirical Index,. Robotics and Computer-Integrated Manufacturing, 744-752.
MLA Xu, Q.,et al."Tracking Performance Characterization and Improvement of a Piezoactuated Micropositioning System Based on an Empirical Index,".Robotics and Computer-Integrated Manufacturing (2010):744-752.
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