Residential College | false |
Status | 已發表Published |
Design of a Compliant Vertical Micropositioning Stage Inspired by Lamina Emergent Mechanism | |
Lyu, Zekui; Xu, Qingsong | |
2022-07 | |
Conference Name | 2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS) |
Source Publication | Proceedings of International Conference on Manipulation, Automation and Robotics at Small Scales 2022 (MARSS 2022) |
Conference Date | July 25-29, 2022 |
Conference Place | Toronto |
Country | Canada |
Author of Source | Haliyo S., Boudaoud M., Diller E., Liu X., Sun Y., Fatikow S. |
Publisher | IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA |
Abstract | The vertical micropositioning stage is a crucial device of precision measurement instruments. Previous vertical platforms often suffer from the disadvantages of large longitudinal dimensions and small output strokes. Inspired by the motion principle of the lamina emergent mechanism, this paper proposes a novel symmetric double-layer compliant vertical micropositioning stage. Such design saves the system footprint in vertical direction with a centimeter-level stroke output. The design and theoretical analysis of the stage are introduced first. Then, the performance simulation of the stage is given based on finite element analysis. A prototype was fabricated through 3D printing technology and preliminary tests were carried out. The stiffness of the overall mechanism obtained from theoretical model, simulation, and experiments shows a good consistency. According to the simulation data, the stiffness of the involved vertical positioning platform is 0.8271 N/mm and the first resonant frequency is 43.96 Hz. The mechanical design proposed in this paper provides a new reference for the design of compliant vertical micropositioning stage. |
Keyword | Compliant Mechanism Vertical Stage Lamina Emergent Mechanism Large Stroke Mechanism Design Micropositioning |
DOI | 10.1109/MARSS55884.2022.9870463 |
URL | View the original |
Indexed By | CPCI-S |
Language | 英語English |
WOS Research Area | Automation & Control Systems ; Science & Technology - Other Topics ; Robotics |
WOS Subject | Automation & Control Systems ; Nanoscience & Nanotechnology ; Robotics |
WOS ID | WOS:000864658200017 |
Scopus ID | 2-s2.0-85139059922 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu, Qingsong |
Affiliation | Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Lyu, Zekui,Xu, Qingsong. Design of a Compliant Vertical Micropositioning Stage Inspired by Lamina Emergent Mechanism[C]. Haliyo S., Boudaoud M., Diller E., Liu X., Sun Y., Fatikow S.:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2022. |
APA | Lyu, Zekui., & Xu, Qingsong (2022). Design of a Compliant Vertical Micropositioning Stage Inspired by Lamina Emergent Mechanism. Proceedings of International Conference on Manipulation, Automation and Robotics at Small Scales 2022 (MARSS 2022). |
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