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Design of a Compliant Vertical Micropositioning Stage Inspired by Lamina Emergent Mechanism
Lyu, Zekui; Xu, Qingsong
2022-07
Conference Name2022 International Conference on Manipulation, Automation and Robotics at Small Scales (MARSS)
Source PublicationProceedings of International Conference on Manipulation, Automation and Robotics at Small Scales 2022 (MARSS 2022)
Conference DateJuly 25-29, 2022
Conference PlaceToronto
CountryCanada
Author of SourceHaliyo S., Boudaoud M., Diller E., Liu X., Sun Y., Fatikow S.
PublisherIEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Abstract

The vertical micropositioning stage is a crucial device of precision measurement instruments. Previous vertical platforms often suffer from the disadvantages of large longitudinal dimensions and small output strokes. Inspired by the motion principle of the lamina emergent mechanism, this paper proposes a novel symmetric double-layer compliant vertical micropositioning stage. Such design saves the system footprint in vertical direction with a centimeter-level stroke output. The design and theoretical analysis of the stage are introduced first. Then, the performance simulation of the stage is given based on finite element analysis. A prototype was fabricated through 3D printing technology and preliminary tests were carried out. The stiffness of the overall mechanism obtained from theoretical model, simulation, and experiments shows a good consistency. According to the simulation data, the stiffness of the involved vertical positioning platform is 0.8271 N/mm and the first resonant frequency is 43.96 Hz. The mechanical design proposed in this paper provides a new reference for the design of compliant vertical micropositioning stage.

KeywordCompliant Mechanism Vertical Stage Lamina Emergent Mechanism Large Stroke Mechanism Design Micropositioning
DOI10.1109/MARSS55884.2022.9870463
URLView the original
Indexed ByCPCI-S
Language英語English
WOS Research AreaAutomation & Control Systems ; Science & Technology - Other Topics ; Robotics
WOS SubjectAutomation & Control Systems ; Nanoscience & Nanotechnology ; Robotics
WOS IDWOS:000864658200017
Scopus ID2-s2.0-85139059922
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Document TypeConference paper
CollectionDEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu, Qingsong
AffiliationDepartment of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Lyu, Zekui,Xu, Qingsong. Design of a Compliant Vertical Micropositioning Stage Inspired by Lamina Emergent Mechanism[C]. Haliyo S., Boudaoud M., Diller E., Liu X., Sun Y., Fatikow S.:IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA, 2022.
APA Lyu, Zekui., & Xu, Qingsong (2022). Design of a Compliant Vertical Micropositioning Stage Inspired by Lamina Emergent Mechanism. Proceedings of International Conference on Manipulation, Automation and Robotics at Small Scales 2022 (MARSS 2022).
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