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Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms
Lyu,Zekui1; Xu,Qingsong1; Zhu,Limin2
2023-01-18
Source PublicationIEEE/ASME Transactions on Mechatronics
ISSN1083-4435
Volume28Issue:4Pages:2131 - 2141
Abstract

This article presents the design and development of a novel compliant vertical micropositioning stage (VMS) with a millimeter stroke and compact profile. The concept design of the stage is inspired by lamina emergent mechanisms. The overall mechanism is fabricated using a plate-like material, which can realize an out-of-plane motion vertical to the mechanism plane. The proposed architectural design guarantees the advantages of the center platform in terms of millimeter stroke, high compactness, and low displacement coupling ratio. Analytical models of the stiffness and resonant frequency of the stage are established by resorting to pseudorigid-body model and Lagrangian equations. They are validated by conducting simulation study with finite element analysis. For performance testing, a prototype stage driven by a voice coil motor is fabricated. Experimental results indicate that the stage (size: 100 mm × 100 mm × 5 mm) delivers a working stroke of 5.58 mm, displacement coupling ratio of 0.31%, and resolution of 0.71 $\mu$m. It exhibits more geometric advantages over existing piezoelectric-actuated vertical stages. In addition, it has superior vertical compactness, linearity, and simplicity compared to a planar mechanism with vertical input and vertical output. The concept design proposed in this article provides a new solution for the design and development of compliant VMS.

KeywordCompact Design Compliant Mechanism Lamina Emergent Mechanism (Lem) Large Stroke Vertical Micropositioning
DOI10.1109/TMECH.2023.3235336
URLView the original
Indexed BySCIE
Language英語English
WOS Research AreaAutomation & Control Systems ; Engineering
WOS SubjectAutomation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical
WOS IDWOS:000920491900001
PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141
Scopus ID2-s2.0-85147279682
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Citation statistics
Document TypeJournal article
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu,Qingsong
Affiliation1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China
2.State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Lyu,Zekui,Xu,Qingsong,Zhu,Limin. Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms[J]. IEEE/ASME Transactions on Mechatronics, 2023, 28(4), 2131 - 2141.
APA Lyu,Zekui., Xu,Qingsong., & Zhu,Limin (2023). Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms. IEEE/ASME Transactions on Mechatronics, 28(4), 2131 - 2141.
MLA Lyu,Zekui,et al."Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms".IEEE/ASME Transactions on Mechatronics 28.4(2023):2131 - 2141.
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