Residential College | false |
Status | 已發表Published |
Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms | |
Lyu,Zekui1; Xu,Qingsong1; Zhu,Limin2 | |
2023-01-18 | |
Source Publication | IEEE/ASME Transactions on Mechatronics |
ISSN | 1083-4435 |
Volume | 28Issue:4Pages:2131 - 2141 |
Abstract | This article presents the design and development of a novel compliant vertical micropositioning stage (VMS) with a millimeter stroke and compact profile. The concept design of the stage is inspired by lamina emergent mechanisms. The overall mechanism is fabricated using a plate-like material, which can realize an out-of-plane motion vertical to the mechanism plane. The proposed architectural design guarantees the advantages of the center platform in terms of millimeter stroke, high compactness, and low displacement coupling ratio. Analytical models of the stiffness and resonant frequency of the stage are established by resorting to pseudorigid-body model and Lagrangian equations. They are validated by conducting simulation study with finite element analysis. For performance testing, a prototype stage driven by a voice coil motor is fabricated. Experimental results indicate that the stage (size: 100 mm × 100 mm × 5 mm) delivers a working stroke of 5.58 mm, displacement coupling ratio of 0.31%, and resolution of 0.71 $\mu$m. It exhibits more geometric advantages over existing piezoelectric-actuated vertical stages. In addition, it has superior vertical compactness, linearity, and simplicity compared to a planar mechanism with vertical input and vertical output. The concept design proposed in this article provides a new solution for the design and development of compliant VMS. |
Keyword | Compact Design Compliant Mechanism Lamina Emergent Mechanism (Lem) Large Stroke Vertical Micropositioning |
DOI | 10.1109/TMECH.2023.3235336 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Automation & Control Systems ; Engineering |
WOS Subject | Automation & Control Systems ; Engineering, Manufacturing ; Engineering, Electrical & Electronic ; Engineering, Mechanical |
WOS ID | WOS:000920491900001 |
Publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC445 HOES LANE, PISCATAWAY, NJ 08855-4141 |
Scopus ID | 2-s2.0-85147279682 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | Faculty of Science and Technology DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu,Qingsong |
Affiliation | 1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China 2.State Key Laboratory of Mechanical System and Vibration, School of Mechanical Engineering, Shanghai Jiao Tong University, Shanghai, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Lyu,Zekui,Xu,Qingsong,Zhu,Limin. Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms[J]. IEEE/ASME Transactions on Mechatronics, 2023, 28(4), 2131 - 2141. |
APA | Lyu,Zekui., Xu,Qingsong., & Zhu,Limin (2023). Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms. IEEE/ASME Transactions on Mechatronics, 28(4), 2131 - 2141. |
MLA | Lyu,Zekui,et al."Design of a Compliant Vertical Micropositioning Stage Based on Lamina Emergent Mechanisms".IEEE/ASME Transactions on Mechatronics 28.4(2023):2131 - 2141. |
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