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Fuzzy-Based Adaptive Reliable Motion Control of a Piezoelectric Nanopositioning System
Chen, Liheng1,2; Xu, Qingsong1
2024-08
Source PublicationIEEE TRANSACTIONS ON FUZZY SYSTEMS
ISSN1063-6706
Volume32Issue:8Pages:4413-4425
Abstract

The nonlinearity and cross-axis coupling of piezo-driven multiple-degree-of-freedom (multi-DOF) nanopositioning systems impose challenges to achieving precise and reliable motion control. This paper develops a new adaptive reliable control approach for a 2-DOF piezoelectric nanopositioning system utilizing a fuzzy back-stepping strategy. First, a virtual tracking model is constructed to address the stabilization problem via a system transformation method. Then, a fuzzy logical system (FLS) model is introduced to mitigate the effects of hysteresis and unmodeled high-order nonlinearity. To obtain high-precision motion tracking with high reliability, the approximation of the unknown piezoelectric actuator's efficiency factor is injected into the reliable controller of nanopositioning systems. Furthermore, an adaptive mechanism based on tracking errors is designed to adjust control parameters automatically to improve the robustness to unknown perturbations. Simulation and practical experiment examples are presented to show the effectiveness and potential of the developed fuzzy reliable nanopositioning control method over existing control approaches.

KeywordAdaptive Fuzzy Control Couplings Degradation Hysteresis Motion Control Nanopositioning Nanopositioning Piezoelectric Actuator Piezoelectric Actuators Reliability Reliable Control Tracking
DOI10.1109/TFUZZ.2024.3399115
URLView the original
Language英語English
PublisherInstitute of Electrical and Electronics Engineers Inc.
Scopus ID2-s2.0-85192767835
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Document TypeJournal article
CollectionFaculty of Science and Technology
DEPARTMENT OF ELECTROMECHANICAL ENGINEERING
Corresponding AuthorXu, Qingsong
Affiliation1.Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Macau, China
2.College of Intelligent Systems Science and Engineering, Harbin Engineering University, Harbin 150001, China
First Author AffilicationFaculty of Science and Technology
Corresponding Author AffilicationFaculty of Science and Technology
Recommended Citation
GB/T 7714
Chen, Liheng,Xu, Qingsong. Fuzzy-Based Adaptive Reliable Motion Control of a Piezoelectric Nanopositioning System[J]. IEEE TRANSACTIONS ON FUZZY SYSTEMS, 2024, 32(8), 4413-4425.
APA Chen, Liheng., & Xu, Qingsong (2024). Fuzzy-Based Adaptive Reliable Motion Control of a Piezoelectric Nanopositioning System. IEEE TRANSACTIONS ON FUZZY SYSTEMS, 32(8), 4413-4425.
MLA Chen, Liheng,et al."Fuzzy-Based Adaptive Reliable Motion Control of a Piezoelectric Nanopositioning System".IEEE TRANSACTIONS ON FUZZY SYSTEMS 32.8(2024):4413-4425.
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