Residential College | false |
Status | 已發表Published |
Design and development of a new large-stroke XY compliant micropositioning stage | |
Wan, Sicong; Zhang, Yulong; Xu, Qingsong | |
2017-09 | |
Source Publication | PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE |
ISSN | 0954-4062 |
Volume | 231Issue:17Pages:3263-3276 |
Abstract | This paper presents the design and development of a new flexure-based compliant XY micropositioning stage with large stroke. The parallel-kinematic XY compliant stage is designed based on the Roberts mechanisms. Pseudo-rigid-body model is developed to establish the quantitative models of the whole compliant mechanism. Finite element analysis is carried out to validate the performance of the XY stage. A prototype of the XY stage is developed for experimental investigations. Experimental results show that the stage can deliver a working range larger than 12mm in each of the two working axes. Moreover, a feedback control using the proportional-integral-derivative control algorithm is implemented to demonstrate the positioning performance of the developed XY stage. The reported ideas can also be extended to the design and control of other micro-/nanopositioning systems. |
Keyword | Micropositioning Stage Pseudo-rigid-body Model Roberts Mechanisms Translational Flexure Bearing Finite-element Analysis Proportional-integral-derivative Control |
DOI | 10.1177/0954406216643341 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering |
WOS Subject | Engineering, Mechanical |
WOS ID | WOS:000408531900015 |
Publisher | SAGE PUBLICATIONS LTD |
The Source to Article | WOS |
Scopus ID | 2-s2.0-85028750723 |
Fulltext Access | |
Citation statistics | |
Document Type | Journal article |
Collection | DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Xu, Qingsong |
Affiliation | Univ Macau, Fac Sci & Technol, Dept Electromech Engn, Macau, Peoples R China |
First Author Affilication | University of Macau |
Corresponding Author Affilication | University of Macau |
Recommended Citation GB/T 7714 | Wan, Sicong,Zhang, Yulong,Xu, Qingsong. Design and development of a new large-stroke XY compliant micropositioning stage[J]. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 2017, 231(17), 3263-3276. |
APA | Wan, Sicong., Zhang, Yulong., & Xu, Qingsong (2017). Design and development of a new large-stroke XY compliant micropositioning stage. PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE, 231(17), 3263-3276. |
MLA | Wan, Sicong,et al."Design and development of a new large-stroke XY compliant micropositioning stage".PROCEEDINGS OF THE INSTITUTION OF MECHANICAL ENGINEERS PART C-JOURNAL OF MECHANICAL ENGINEERING SCIENCE 231.17(2017):3263-3276. |
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