Residential College | false |
Status | 已發表Published |
Design of a Flexure XY Micropositioning Stage with Large Hollow Platform | |
Hanlun Zhang; Zehao Wu; Qingsong Xu | |
2020-07-13 | |
Conference Name | 2020 International Conference on Manipulation, Automation, and Robotics at Small Scales, MARSS 2020 |
Source Publication | Proceedings of MARSS 2020: International Conference on Manipulation, Automation, and Robotics at Small Scales |
Pages | 9307915 |
Conference Date | 13-17 July 2020 |
Conference Place | Toronto, ON, Canada |
Country | Canada |
Publisher | IEEE |
Abstract | This paper presents the design of a new flexure-based XY micropositioning stage with a large hollow platform, which is suitable for practical use with a microscope. The designed mechanism has a parallel-kinematic structure and is actuated by two voice coil motors. By employing multistage compound parallelogram flexures (MCPF), the stage is designed as a four-layer structure, which produces a motion output platform with a large hollow space and large motion range. Analytical modeling is carried out for the parametric design of the stage. Evaluation results show that the designed XY stage exhibits a large safety factor and high natural frequency. Moreover, the large hollow platform is well-suited for practical application with a microscope. |
DOI | 10.1109/MARSS49294.2020.9307915 |
URL | View the original |
Indexed By | SCIE |
Language | 英語English |
WOS Research Area | Engineering ; Instruments & Instrumentation |
WOS Subject | Engineering, Mechanical ; Instruments & Instrumentation |
WOS ID | WOS:000580554800001 |
Scopus ID | 2-s2.0-85099568537 |
Fulltext Access | |
Citation statistics | |
Document Type | Conference paper |
Collection | Faculty of Science and Technology DEPARTMENT OF ELECTROMECHANICAL ENGINEERING |
Corresponding Author | Qingsong Xu |
Affiliation | e Department of Electromechanical Engineering, Faculty of Science and Technology, University of Macau, Avenida da Universidade, Taipa, Macau, China |
First Author Affilication | Faculty of Science and Technology |
Corresponding Author Affilication | Faculty of Science and Technology |
Recommended Citation GB/T 7714 | Hanlun Zhang,Zehao Wu,Qingsong Xu. Design of a Flexure XY Micropositioning Stage with Large Hollow Platform[C]:IEEE, 2020, 9307915. |
APA | Hanlun Zhang., Zehao Wu., & Qingsong Xu (2020). Design of a Flexure XY Micropositioning Stage with Large Hollow Platform. Proceedings of MARSS 2020: International Conference on Manipulation, Automation, and Robotics at Small Scales, 9307915. |
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